High-frequency enhancement-mode (E-mode) AlGaN/GaN high-electron-mobility transistors (HEMTs) with plasma oxidation technology (POT) were fabricated through plasma-enhanced chemical vapor deposition. POT enables the formation of a thin oxide layer in the gate region, which decreases the gate leakage by at least two orders of magnitude compared with conventional recessed gate HEMTs. Ultra-low leakage was achieved in the fabricated device, with Ioff = 9.5 × 10−7 mA/mm and a high ON/OFF ratio of over 109. Good suppression of current collapse was obtained after the application of POT in the access region. The enhancement-mode AlGaN/GaN HEMTs with POT showed an outstanding performance, with a Vth of 0.4 V, a maximum drain current of 965 mA/mm, and an fmax of 272 GHz.
In this work, low voltage RF power capability on AlGaN/GaN and InAlN/GaN HEMTs is analysed from the perspective of DC and pulse characteristics, for terminal applications whose operating voltage is usually in the range of 3 to 15 V. Device fabrication is performed on mature AlGaN/GaN heterojunction as well as strongly polarized InAlN/GaN heterojunction, to make a comparison of low voltage RF power capability between two devices. Although it suffers from relatively severe RF dispersion, InAlN/GaN HEMT delivers higher output power density (Pout) than its opponent, benefiting from the lower parasitic resistance and knee voltage as well as higher output current density. At 8 GHz, Pout of 1.62 W/mm and 1.10 W/mm are achieved for InAlN/GaN and AlGaN/GaN HEMT, respectively, both of which are biased at class AB operation and Vds of 9 V. However, the tremendous degradation of power added efficiency (PAE) occurs as the higher drain voltage is applied on InAlN/GaN HEMT, as the result of the severe gate leakage. What is more, a higher PAE is more necessary than Pout for terminal applications. Either InAlN/GaN HEMT or AlGaN/GaN HEMT has its own specific voltage range to deliver higher PAE. Concretely, InAlN/GaN HEMT is more suitable to applications with operating voltage not exceeding 6 V, and AlGaN/GaN HEMT is preferred for ones with relatively higher voltage, accompanied by the decent PAE as high as 62% to 66% and moderate Pout to meet the demand of various low voltage terminal applications.
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