The sputtering deposition (SPD) technique applicable for infra-red reflecting (IR) film coating on ellipsoidal bulbs of halogen lamps was investigated. To realize a uniform IR layer coating on such bulbs, a specifically designed spin and swing motion mechanism for coating bulbs and a novel monitoring system for controlling the coating layer thickness were developed. The IR film coating produced by the SPD processes is shown to offer a worthwhile energy saving of approximately 17% of the lamp power consumption.
Using a (ZrTi + PbO) composite target in the quasi-metallic mode reactive sputtering (QMMRS) system, perovskite Pb(Zr,Ti)O 3 films were deposited at a rate of 8 nm/min at the substrate temperature of 450 • C. X-ray diffraction analysis of a film deposited at a substrate temperature of 450 • C and with O 2 /Ar = 2.1%, using a powder target with a stoichiometric composition of PZT of Pb : Ti : Zr = 1 : 0.5 : 0.5, revealed that it had almost the same crystal structure as that of a film produced using a (ZrTi + 30%PbO) composite target. The deposition rate was 3 nm/min. To fabricate PZT thin films at a high deposition rate using QMMRS, a (Pb + ZrO 2 + Ti) mixture target was prepared. Although it is possible to produce a film with a high deposition rate at 450 • C, perovskite PZT film could not be obtained. This may be due to differences in sputtering yield for Zr and ZrO 2 atoms or in the heat of formation of PbO and ZrO 2 molecules. A new solid target that is free from the problems associated with the (Pb + ZrO 2 + Ti) mixture target is currently being developed.KEYWORDS: composite, powder and mixture targets, ferroelectric PZT thin film, quasi-metallic mode reactive sputtering, low temperature, high deposition rate 6882
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