A platform for the realization of tightly-confined lithium niobate photonic devices and circuits on silicon substrates is reported based on wafer bonding and selective oxidation of refractory metals. The heterogeneous photonic platform is employed to demonstrate high-performance lithium niobate microring optical resonators and Mach-Zehnder optical modulators. A quality factor of ~7.2 × 10⁴ is measured in the microresonators, and a half-wave voltage-length product of 4 V.cm and an extinction ratio of 20 dB is measured in the modulators.

Silicon-on-nitride ridge waveguides are demonstrated and characterized at mid-and near-infrared optical wavelengths. Silicon-on-nitride thin films were achieved by bonding a silicon handling die to a silicon-on-insulator die coated with a low-stress silicon nitride layer. Subsequent removal of the silicon-on-insulator substrate results in a thin film of silicon on a nitride bottom cladding, readily available for waveguide fabrication. At the mid-infrared wavelength of 3.39 lm, the fabricated waveguides have a propagation loss of 5.2 6 0.6 dB/cm and 5.1 6 0.6 dB/cm for the transverse-electric and transverse-magnetic modes, respectively. V

Second-harmonic generation is demonstrated using grating-assisted quasi-phase matching, based on waveguide-width modulation or mode-shape modulation. Applicable to any thin-film integrated second-order nonlinear waveguide, the technique is demonstrated in compact lithium niobate ridge waveguides. Fabricated devices are characterized with pulsed-pumping in the near-infrared, showing second-harmonic generation at a signal wavelength of 784 nm and propagation loss of 1 dB/cm.

Suspended silicon-membrane ridge waveguides are fabricated and characterized on a single-material photonic device platform. By using direct bonding, a thin layer of silicon is fused to a bulk silicon substrate, which is patterned with narrow trenches. Waveguides are etched on the resulting suspended membranes and are characterized at mid-and near-infrared wavelengths. Transverse magnetic-mode propagation losses of 2.8 6 0.5 and 5.6 6 0.3 dB/cm at 3.39 and 1.53 lm wavelengths are measured, respectively. This all-silicon optical platform is capable of continuous low-loss waveguiding from wavelengths of 1.2-8.5 lm, enabling numerous applications in frequency conversion and spectral analysis. V

A novel class of high-speed and tunable integrated photonic delay lines that compromise between loss and size is proposed. The devices consist of two cascaded apodized grating waveguides and with complementary (positively and negatively modulated) refractive index profiles for dispersion compensation. It is shown that the compact tunable delay lines are low-loss and offer long true-time delays and tuning ranges and high operation bit rates.