We present research investigations in the eld of multilayer optics in X-ray and extreme ultra-violet ranges (XUV), aimed at the development of optical elements for applications in experiments in physics and in scienti c instrumentation. We discuss normal incidence multilayer optics in the spectral region of \water window", multilayer optics for collimation and focusing of hard X-rays, multilayer dispersing elements for X-ray spectroscopy of high-temperature plasma, multilayer dispersing elements for analysis of low Z-elements. Our research pays special attention to optimization of multilayer optics for projection EUV-lithography ( ¶ = 13nm) and short period multilayer optics.
A novel instrumentation for wavelength-and time-resolved plasma emission tomography in the range 0.1-4 keV has been demonstrated on the Torus Experiment for Technology Oriented Research ͑TEXTOR͒. The technique is intended for reconstruction of distributions of local emission coefficients ͑LEC͒ for selected spectral lines of impurity ions. Further determination ͑with additional data on electron density and temperature͒ of spatial distributions of impurity ions at particular ionization stages will become feasible. Spectrally selective plasma images at several viewpoints around plasma are obtained with miniature pinhole cameras supplemented with multilayer mirrors as dispersion elements. The x-ray image is converted to a visible image and transported by a fiber bundle to a gain enhanced recording camera with an electron bombarded charge coupled device tube. A part of the system has been installed on temporary TEXTOR ports. First demonstration results have been obtained on plasma imaging and on subsequent LEC reconstruction using a modified iterative sinogram restoration tomography algorithm. The complete diagnostics will be operational after the TEXTOR shutdown in 2001.
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