Silicon-on-glass vertical NPN's and PNP's with collector contacts on the back of the wafer directly under the emitter are investigated in relationship to the collector contacting method. Increased base-leakage and impact-ionization currents were found when the collector contacts were implanted. This effect is related to the residual implantation damage at a distance from the contact that cannot be thermal annealed during the lowtemperature back-wafer processing.
Ultrashallow junctions (USJ) were created by tilted 5 keV As + implantation to a dose of 3x10 15 cm -2 followed by excimer laser annealing (ELA). Sheet resistance and capacitances were measured in the background layer below the USJ. Results showed that sheet resistance was dependent on the laser energies in the close vicinity of these diodes. Doping profiles extracted from the capacitances indicated electrical deactivation here caused by the residual implantation defects. The extent and location of the residual damage is shown to be strongly dependent on the implantation dose and tilt angles, and also influenced by the laser annealing.
High resolution numerical weather models have recently raised a great interest in the InSAR community for atmospheric phase screen (APS) mitigation. Following the research carried out in [1], in this study we focus on investigating the sensitivity of WRF (Weather Research and Forecasting) predictions to the model parameter settings which may substantially affect the result of water vapor modeling and to different boundary conditions. We validate the model predictions using atmosphere-only interferograms as well as radiosonde records. Our result shows that the radiosonde records (on average) agree very well with the WRF predictions based on our new model settings. However, in terms of spatio-temporal delay variation, the new settings do not always lead to a better prediction and the correction of atmospheric delay is case dependent. Therefore, we conclude that WRF lacks the reliability to correct the realistic APS in interferograms.
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