This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/√Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.

To achieve the expected level of sensitivity of third-generation
gravitational-wave observatories, more accurate and sensitive instruments than those of the second generation must be used to reduce all sources of noise.
Amongst them, one of the most relevant is seismic noise, which will require the
development of a better isolation system, especially at low frequencies (below 10
Hz), the operation of large cryogenic silicon mirrors, and the improvement of
optical wavelength readouts. In this framework, this article presents the activities
of the E-TEST (Einstein Telescope Euregio Meuse-Rhine Site & Technology) to
develop and test new key technologies for the next generation of GW observatories.
A compact isolator system for a large silicon mirror at a low frequency is proposed. The design of the isolator allows the overall height
of the isolation system to be significantly compact and also suppresses seismic
noise at low frequencies. To minimize the effect of thermal noise, the isolation
system is provided with a 100-kg silicon mirror which is suspended in a vacuum
chamber at cryogenic temperature (25-40 K). To achieve this temperature without
inducing vibrations to the mirror, a radiation-based cooling strategy is employed.
In addition, cryogenic sensors and electronics are being developed as part of the
E-TEST to detect vibrational motion in the penultimate cryogenic stage. Since
the used silicon material is not transparent below the wavelengths
typically used for GW detectors, new optical components and
lasers must be developed in the range above 1500 nm to reduce absorption and
scattering losses. Therefore, solid-state and fiber lasers with a wavelength of 2090
nm, matching high-efficiency photodiodes, and low-noise crystalline coatings are
being developed. Accordingly, the key technologies provided by E-TEST serve
crucially to reduce the limitations of the current generation of GW observatories
and to determine the technical design for the next generation.


The surge in fabrication techniques for micro- and nanodevices gave room to rapid growth in these technologies and a never-ending range of possible applications emerged. These new products significantly improve human life, however, the evolution in the design, simulation and optimization process of said products did not observe a similarly rapid growth. It became thus clear that the performance of micro- and nanodevices would benefit from significant improvements in this area. This work presents a novel methodology for electro-mechanical co-optimization of micro-electromechanical systems (MEMS) inertial sensors. The developed software tool comprises geometry design, finite element method (FEM) analysis, damping calculation, electronic domain simulation, and a genetic algorithm (GA) optimization process. It allows for a facilitated system-level MEMS design flow, in which electrical and mechanical domains communicate with each other to achieve an optimized system performance. To demonstrate the efficacy of the methodology, an open-loop capacitive MEMS accelerometer and an open-loop Coriolis vibratory MEMS gyroscope were simulated and optimized—these devices saw a sensitivity improvement of 193.77% and 420.9%, respectively, in comparison to their original state.

No abstract

This article reports a mode-localized mass 1 sensor based on thermal-actuation piezoresistive-detection 2 self-oscillated weakly coupled resonators. Detailed theo-3 retical models and simulations of the self-oscillation of 4 the coupled resonators were established and were also 5 verified using optical and electrical measurements. The sen-6 sor was fabricated and characterized in terms of stability, 7 linearity, sensitivity, and resolution. Supplied with only a 8 constant direct current (DC), the resonant mass sensor 9 could oscillate at its resonant frequency with an ultrahigh 10 quality factor of 95 k in air. By implementing the principle of 11 the mode localization phenomenon, ∼200 times parametric 12 sensitivity improvement with amplitude ratio output was 13 implemented compared to the traditional frequency output 14 metric. A real-time mass detector with 84-fg resolution 15 and larger than ∼700-pg linear measurement range was 16 obtained.