This paper describes a novel, semiautomated design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. The proposed method can design MEMS devices comprising freeform geometries and optimize such MEMS devices to provide high sensitivity, large bandwidth, and large fabrication tolerances. The proposed method does not require much computation time or memory. The use of freeform geometries allows more degrees of freedom in the design process, improving the diversity and performance of MEMS devices. A MEMS accelerometer comprising a mechanical motion amplifier is presented to demonstrate the effectiveness of the design approach. Experimental results show an improvement in the product of sensitivity and bandwidth by 100% and a sensitivity improvement by 141% compared to the case of a device designed with conventional orthogonal shapes. Furthermore, excellent immunities to fabrication tolerance and parameter mismatch are achieved.

With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, the transduction mechanism, and the applications. BAW MEMS resonators normally exhibit two types of vibration modes: lateral (in-plane) modes and flexural (out-of-plane) modes. Compared to flexural modes, lateral modes exhibit a higher stiffness with a higher operating frequency, resulting in a lower internal loss. Also, the lateral mode has a higher Q factor, as the fluid damping imposes less influence on the in-plane motion. The coupled BAW MEMS resonators in these two vibration modes are investigated in this work and their applications for sensing, timing, and frequency reference are also presented.

This paper describes a novel electrostatically actuated microgripper with freeform geometries designed by a genetic algorithm. This new semiautomated design methodology is capable of designing near-optimal MEMS devices that are robust to fabrication tolerances. The use of freeform geometries designed by a genetic algorithm significantly improves the performance of the microgripper. An experiment shows that the designed microgripper has a large displacement (91.5 μm) with a low actuation voltage (47.5 V), which agrees well with the theory. The microgripper has a large actuation displacement and can handle micro-objects with a size from 10 to 100 μm. A grasping experiment on human hair with a diameter of 77 μm was performed to prove the functionality of the gripper. The result confirmed the superior performance of the new design methodology enabling freeform geometries. This design method can also be extended to the design of many other MEMS devices.

This paper demonstrates, for the first time, a high sensitivity mass sensor based on thermal-actuation piezoresistive-detection coupled resonators with a selfsustained oscillation. In-plane-vibration resonators are actuated by thermal expansion and contraction of the nanobeams, while the vibration displacements are detected by changes in resistance. Due to the combination of the negative piezoresistive coefficient of the phosphorusdoped structural silicon layer and the thermal expansion/contraction effect, a constant direct current (DC) through the nanobeam produces a periodic resistance variation in the beam at the fundamental modal frequency as the resonator, thus a self-sustained oscillation is generated. An ultra-high quality factor of ~95k in air is obtained. Linear response with respect to mass perturbations for both amplitude ratio (of the two coupled resonators) and frequency shift readouts are observed from the proposed self-oscillating, mode-localized mass sensor. The measured sensitivity of the amplitude ratio (~162 ppm/pg) is 100 times higher than that of a shift in the normalized resonant frequency.

Thermal-actuation and piezoresistive-detection effects have been employed to pump the effective quality factor of MEMS resonators, targeting better mass sensing performance in air. In this paper, frequency resolution (bias instability) of a thermal-piezoresistive resonator operating in air at room temperature is experimentally investigated. It is found that the dynamic range decreases when increasing the bias direct current whereas the effective quality factor rises. The measurement results indicate a maximum effective quality factor of 169k with a dynamic range of 47.8 dB for a bias current of 6.25 mA, and a minimum effective quality factor of 11.3k with a dynamic range of 70.1 dB for a bias current is 5.8 mA. Our work also shows that the frequency and amplitude bias instabilities are significantly lower due to the dynamic range decrease for a high bias current.[2021-0250]