Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

Wang, Chen; Song, Xiaoxiao; Fang, Weidong; Chen, Fang; Zeimpekis, Ioannis; Wang, Yuan; Quan, Aojie; Bai, Jian; Liu, Huafeng; Schropfer, G.; Welham, Chris; Kraft, Michaël

doi:10.1038/s41378-020-00214-1

Cited by 17 publications

(9 citation statements)

References 30 publications

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“…However, the market still looks for lighter and cheaper choices. The evolution of microelectromechanical systems (MEMS) accelerated the miniaturization and cost reduction of all kinds of devices [6][7][8][9] , enabling low noise capacitive MEMS accelerometer to be developed and applied to these applications. Commercially available products such as SI1003 by Colibrys and ADXL1001 by Analog Devices have already achieved in-band noise densities from sub -μg= ffiffiffiffiffiffi Hz p to dozens of μg= ffiffiffiffiffiffi Hz p .…”

Section: Introductionmentioning

confidence: 99%

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

et al. 2023

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Potentially applied in low-noise applications such as structural health monitoring (SHM), a 1-axis piezoelectric MEMS accelerometer based on aerosol deposition is designed, fabricated, simulated, and measured in this study. It is a cantilever beam structure with a tip proof mass and PZT sensing layer. To figure out whether the design is suitable for SHM, working bandwidth and noise level are obtained via simulation. For the first time, we use aerosol deposition method to deposit thick PZT film during the fabrication process to achieve high sensitivity. In performance measurement, we obtain the charge sensitivity, natural frequency, working bandwidth and noise equivalent acceleration of 22.74 pC/g, 867.4 Hz, 10–200 Hz (within ±5% deviation) and 5.6 $$\mu {{{\rm{g}}}}/\sqrt{{{{\rm{Hz}}}}}$$ μ g / Hz (at 20 Hz). To demonstrate its feasibility for real applications, vibrations of a fan are measured by our designed sensor and a commercial piezoelectric accelerometer, and the results match well with each other. Moreover, shaker vibration measurement with ADXL1001 indicates that the fabricated sensor has a much lower noise level. In the end, we show that our designed accelerometer has good performance compared to piezoelectric MEMS accelerometers in relevant studies and great potential for low-noise applications compared to low-noise capacitive MEMS accelerometers.

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Section: Introductionmentioning

confidence: 99%

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

et al. 2023

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“…With the rapid development of micro/nanotechnology tools, numerous micromanipulators, including microarrays 1 , 2 , microfluidic chips 3 , 4 , microinjectors 5 , 6 , and microgrippers 7 – 9 , are being widely utilized in biomedical devices 10 , 11 , material science 12 – 14 , and microelectromechanical systems 15 , 16 . As an efficient method of transporting external substances into cells, microinjection plays a crucial role in biological experiments.…”

Section: Introductionmentioning

confidence: 99%

Design of an automated robotic microinjection system for batch injection of zebrafish embryos and larvae

Guo,

Ai,

et al. 2024

Microsyst Nanoeng

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This paper presents the design of a vision-based automated robotic microinjection system for batch injection of both zebrafish embryos and larvae. A novel visual recognition algorithm based on an automatic threshold and excessive dilatation is introduced to accurately identify the center of zebrafish embryos and larval yolks. A corresponding software system is developed using the producer-consumer model as the framework structure, and a friendly user interface is designed to allow operators to choose from a range of desired functions according to their different needs. In addition, a novel microstructural agarose device is designed and fabricated to simultaneously immobilize mixed batches of embryos and larvae. Moreover, a prototype microinjection system is fabricated by integrating hardware devices with visual algorithms. An experimental study is conducted to verify the performance of the robotic microinjection system. The results show that the reported system can accurately identify zebrafish embryos and larvae and efficiently complete batch microinjection tasks of the mixtures with an injection success rate of 92.05% in 13.88 s per sample. Compared with manual and existing microinjection systems, the proposed system demonstrates the merits of versatility, excellent efficiency, high success rate, high survival rate, and sufficient stability.

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“…Micro accelerometer is currently one type of the most mature micro-electromechanical systems (MEMS) sensors. Due to its advantages of miniaturization and integration, it has been gradually applied in various industries, such as consumer electronics, medical health, control and navigation, etc., which has attracted the attention of many researchers [1][2][3][4]. However, there is currently little research on MEMS accelerometers used in harsh environments, such as in aerospace.…”

Section: Introductionmentioning

confidence: 99%

A MEMS All‐SiC Accelerometer and its Application in Vibration Test of Aero‐Engine†

Zhai,

Xu,

et al. 2023

IEEJ Transactions Elec Engng

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This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ω μm, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero‐engine, and the vibration signal of the turbine components and the test bed was successfully extracted. © 2023 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.

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Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

Cited by 17 publications

References 30 publications

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

Design of an automated robotic microinjection system for batch injection of zebrafish embryos and larvae

A MEMS All‐SiC Accelerometer and its Application in Vibration Test of Aero‐Engine†

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