Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Wang, Chen; Chen, Fang; Wang, Yuan; Sadeghpour, Sina; Wang, Chenxi; Baijot, Mathieu; Esteves, Rui Amendoeira; Zhao, Chun; Bai, Jian; Liu, Huafeng; Kraft, Michaël

doi:10.3390/s20144054

Cited by 68 publications

(40 citation statements)

References 115 publications

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“…MOEMS accelerometers combine optical measurements with the micro-electronic mechanical system (MEMS) technology. MOEMS technology has gained increasing attention in the scientific community due to its wide variety of advantages, such as immunity to electromagnetic interference, electrical insulation, corrosion resistance, remote sensing, high sensitivity, and multiplexing ability [ 2 , 3 , 4 ]. A wide range of applications exists for of this type of accelerometers, including inertial navigation with high accuracy, vibration sensing of vehicles, seismic sensing, and oil-field applications [ 5 , 6 ].…”

Section: Introductionmentioning

confidence: 99%

“…Compared with the previous design [ 19 ], the test results showed that the response sensitivity of the MOEMS accelerometer was about

and the self-noise decreased from 185.8 ng/√Hz to 15 ng/√Hz. Among the micromachined accelerometers with sub-μg/√Hz noise floor, this type of optical accelerometer has a lower noise floor and is expected to be used in seismic surveys and other fields [ 2 ].…”

Section: Introductionmentioning

confidence: 99%

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Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Yao

Pan

Wang

et al. 2021

Sensors

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The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which makes it a promising candidate for inertial navigation and seismic monitoring. This paper proposes a modified micro-grating-based accelerometer and introduces a new design method to characterize the grating interferometer. A MEMS sensor chip with high sensitivity was designed and fabricated, and the processing circuit was modified. The micro-grating interference measurement system was modeled, and the response sensitivity was analyzed. The accelerometer was then built and benchmarked with a commercial seismometer in detail. Compared to the previous prototype in the experiment, the results indicate that the noise floor has an ultra-low self-noise of 15 ng/Hz1/2.

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Section: Introductionmentioning

confidence: 99%

“…Compared with the previous design [ 19 ], the test results showed that the response sensitivity of the MOEMS accelerometer was about

Section: Introductionmentioning

confidence: 99%

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Yao

Pan

Wang

et al. 2021

Sensors

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“…These all have high requirements for the low-frequency performances of seismometers [ 1 , 2 , 3 , 4 , 5 ]. However, conventional seismometers based on moving-coils, optic-fibers, and piezoelectrics cannot effectively address these requirements due to poor low-frequency characteristics [ 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 ]. Meanwhile, electrochemical seismometers that have appeared in recent years use electrolytes as inertial masses and are featured with large working angles, high sensitivities, low noise levels, and excellent low-frequency performances.…”

Section: Introductionmentioning

confidence: 99%

MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure

She

Wang

Chen

et al. 2021

Sensors

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This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through holes of the silicon wafer. Device design and numerical simulations were conducted to model the functionality of the three-electrode structure in detecting vibration signals with the key geometrical parameters optimized. The CAC integrated three-electrode structure was then manufactured by microfabrication, which demonstrated a simplified fabrication process in comparison with conventional four-electrode structures. Device characterization shows that the sensitivity of the CAC microseismometer was an order of magnitude higher than that of the CME6011 (a commercially available four-electrode electrochemical seismometer), while the noise level was comparable. Furthermore, in response to random vibrations, a high correlation coefficient between the CAC and the CME6011 (0.985) was located, validating the performance of the developed seismometer. Thus, the developed electrochemical microseismometer based on an integrated three-electrode structure may provide a new perspective in seismic observations and resource explorations.

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“…In the 1980s, micro-accelerometers were made using integrated circuits (ICs) and micromachining, which gave them the advantages of small volume [ 5 ], light weight [ 6 ], low power consumption [ 7 ], low cost [ 8 ], easy integration [ 9 ], strong overload capacity [ 10 ], and mass production [ 11 ]. These not only became the core components of micro-inertial measurement units (MIMUs) [ 12 ] but also rapidly expanded into other civil fields [ 13 , 14 ].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer

et al. 2021

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In this study, a comb-type capacitive accelerometer based on a silicon carbide (SiC) microstructure is presented and investigated by the finite element method (FEM). It has the advantages of low weight, small volume, and low cross-coupling. Compared with silicon(111) accelerometers with the same structure, it has a higher natural frequency. When the accelerometer vibrates, its resistive force consists of two main components: a viscous damping and an elastic damping force. It was found that viscous damping dominates at low frequency, and elastic damping dominates at high frequency. The second-order linear system of the accelerometer was analyzed in the time-frequency domain, and its dynamic characteristics were best when the gap between the capacitive plates was 1.23 μm. The range of this accelerometer was 0–100 g, which is 1.64 times that of a silicon(111) accelerometer with the same structure. In addition, the accelerometer could work normally at temperatures of up to 1200 °C, which is much higher than the working temperatures of silicon devices. Therefore, the proposed accelerometer showed superior performance compared to conventional silicon-based sensors for inertial measurements.

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Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Cited by 68 publications

References 115 publications

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure

Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer

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