Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Yao, Yuan; Pan, Debin; Wang, Jianbo; Dong, Tao; Guo, Jie; Wang, Chensheng; Geng, Ansong; Fang, Weidong; Lu, Qiuyu

doi:10.3390/s21062070

Cited by 15 publications

(5 citation statements)

References 37 publications

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“…The sensitivity of the accelerometer has reached 619 V/g. A similar study was done by Lu et al with good results [66][67][68][69][70], and the specific parameters are shown in Table 3.…”

Section: Optical Intensity Modulationsupporting

confidence: 55%

Optical Accelerometers for Detecting Low-Frequency Micro-Vibrations

Lei

Zhang

et al. 2022

Applied Sciences

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Optical accelerometers are high-precision inertial sensors that use optical measurement technology to achieve high-precision and electromagnetic interference-resistant acceleration measurements. With the intensive research and development of optical accelerometers in recent years, their applications in inertial navigation, structural health monitoring, precision vibration isolation systems, wind turbine fault monitoring, earthquake monitoring, and other low-frequency vibration detection have flourished. Optical accelerometers have various schemes; however, their characteristics vary considerably due to different optical modulation schemes. This study aims to address the lack of systematic evaluation of currently available low-frequency optical accelerometers. Optical accelerometers can be classified into four categories in accordance with their optical modulation schemes: optical path-, optical intensity-, optical phase-, and optical wave-length-modulated accelerometers. The typical performance, advantages and disadvantages, and possible application scenarios of various optical accelerometers are summarized. This study also presents the current status and trends of low-frequency optical accelerometers in consideration of the growing demand for high-precision, low-frequency acceleration measurements.

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“…The sensitivity of the accelerometer has reached 619 V/g. A similar study was done by Lu et al with good results [66][67][68][69][70], and the specific parameters are shown in Table 3.…”

Section: Optical Intensity Modulationsupporting

confidence: 55%

Optical Accelerometers for Detecting Low-Frequency Micro-Vibrations

Lei

Zhang

et al. 2022

Applied Sciences

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“…According to Equations ( 6) and ( 7), the Brownian noise of the accelerometer can be reduced by increasing the mass of the moving system, reducing the resonance frequency and increasing the Q-factor [42]. A massive mechanical system is difficult to fabricate, while the reduction in the stiffness is less consuming.…”

Section: Coupling Lengthmentioning

confidence: 99%

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

et al. 2023

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Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages—such as high sensitivity and immunity to electromagnetic noise—over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelerometers, which include a spring mass and a tunneling-effect-based optical sensing system containing an optical directional coupler consisting of a fixed and a movable waveguide separated by an air gap. The movable waveguide can perform linear and angular movement. In addition, the waveguides can lie in single or different planes. Under acceleration, the schemes feature the following changes to the optical system: gap, coupling length, overlapping area between the movable and fixed waveguides. The schemes with altering coupling lengths feature the lowest sensitivity, yet possess a virtually unlimited dynamic range, which makes them comparable to capacitive transducers. The sensitivity of the scheme depends on the coupling length and amounts to 11.25 × 103 m−1 for a coupling length of 44 μm and 30 × 103 m−1 for a coupling length of 15 μm. The schemes with changing overlapping areas possess moderate sensitivity (1.25 × 106 m−1). The highest sensitivity (above 6.25 × 106 m−1) belongs to the schemes with an altering gap between the waveguides.

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“…[12] Yuan Yao et al integrated VCSELs and photodiode (PD) arrays on a single chip, which further contributed to the miniaturization and stability of the sensor structure while improving the sensor's accuracy. [13] Eitel et al proposed a VCSEL chip with an integrated microlens array, it is used for laser shaping, which effectively improves the interferometric sensitivity of the accelerometer (Figure 4c). [14] To Figure 3.…”

Section: Diffraction Grating Interference Accelerometermentioning

confidence: 99%

Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios.

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Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Cited by 15 publications

References 37 publications

Optical Accelerometers for Detecting Low-Frequency Micro-Vibrations

Optical Accelerometers for Detecting Low-Frequency Micro-Vibrations

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

Optical Interferometric MEMS Accelerometers

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