Friction and wear are major concerns in the performance and reliability of microelectromechanical systems (MEMS) devices employing sliding contacts. While many tribological coating materials are available, most traditional surface coating processes are unable to apply conformal coatings to the high aspect ratio (height/width) structures typical of MEMS devices. We demonstrate that thin, conformal, wear-resistant coatings can be applied to Si surface-micromachined structures by atomic-layer deposition (ALD). For this demonstration, we apply 10-nm-thick films of Al2O3 using a binary reaction sequence with precursors of trimethyl aluminum and water. Deposition is carried out in a viscous flow reactor at 1 Torr and 168 °C, with N2 as a carrier gas. Cross-section transmission electron microscopy analysis shows that films are uniform to within 5% on MEMS device structures with aspect ratio ranging from 0 to >100. Films are stoichiometric Al2O3, with no evidence of contamination from other species, and are amorphous. Preliminary friction and wear data show that ALD films have promising properties for application to MEMS devices.

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a b s t r a c tSintering of nanoparticles is an important contributor to loss of activity in heterogeneous catalysts, such as those used for controlling harmful emissions from automobiles. But mechanistic details, such as the rates of atom emission or the nature of the mobile species, remain poorly understood. Herein we report a novel approach that allows direct measurement of atom emission from nanoparticles. We use model catalyst samples and a novel reactor that allows the same region of the sample to be observed after short-term heat treatments (seconds) under conditions relevant to diesel oxidation catalysts (DOCs). Monometallic Pd is very stable and does not sinter when heated in air (T 6 800°C). Pt sinters readily in air, and at high temperatures (P800°C) mobile Pt species emitted to the vapor phase cause the formation of large, faceted particles. In Pt-Pd nanoparticles, Pd slows the rate of emission of atoms to the vapor phase due to the formation of an alloy. However, the role of Pd in Pt DOCs in air is quite complex: at low temperatures, Pt enhances the rate of Pd sintering (which otherwise would be stable as an oxide), while at higher temperature Pd helps to slow the rate of Pt sintering. DFT calculations show that the barrier for atom emission to the vapor phase is much greater than the barrier for emitting atoms to the support. Hence, vapor-phase transport becomes significant only at high temperatures while diffusion of adatoms on the support dominates at lower temperatures.

The synthesis and characterization of crystalline tungsten disulphide (WS2) solid lubricant thin films grown by atomic layer deposition (ALD) using WF6 and H2S gas precursors was studied. A new catalytic route was established to promote nucleation and growth of WS2 films on silicon surfaces with native oxide. Scanning electron microscopy with energy dispersive spectroscopy and Raman spectroscopy were used to determine the film morphology, composition, and crystallinity. The films exhibited solid lubricating behavior with a steady-state friction coefficient of 0.04 in a dry nitrogen environment.

Pt is an active catalyst for diesel exhaust catalysis but is known to sinter and form large particles under oxidizing conditions. Pd is added to improve the performance of the Pt catalysts. To investigate the role of Pd, we introduced metallic Pt nanoparticles via physical vapor deposition to a sample containing PdO nanoparticles. When the catalyst was aged in air, the Pt particles disappeared, and the Pt was captured by the PdO, forming bimetallic Pt-Pd nanoparticles. The formation of metallic Pt-Pd alloys under oxidizing conditions is indeed remarkable but is consistent with bulk thermodynamics. The results show that mobile Pt species are effectively trapped by PdO, representing a novel mechanism by which Ostwald ripening is slowed down. The results have implications for the development of sinter-resistant catalysts and help explain the improved performance and durability of Pt-Pd in automotive exhaust catalytic converters.