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Nanocrystalline TiC/amorphous carbon (a-C) composite films were synthesized at near room temperature with a hybrid process combining laser ablation of graphite and magnetron sputtering of titanium. Film microstructure was investigated by x-ray photoelectron spectroscopy, x-ray diffraction analyses, and transmission electron microscopy. Mechanical properties were evaluated from nanoindentation, scratch, and friction tests. The films consisted of 10 nm sized TiC crystallites encapsulated in a sp3 bonded a-C matrix. They had a hardness of about 32 GPa and a remarkable plasticity (40% in indentation deformation) at loads exceeding their elastic limit. They were also found to have a high scratch toughness in addition to a low (about 0.2) friction coefficient. The combination of hardness and ductility was correlated with film phase composition and structural analyses, using concepts of nanocomposite mechanics. The properties of the TiC/a-C composites make them beneficial for surface wear and friction protection.

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