International audienceA surface mountable tunable SIW filter based on coupled coaxial resonators is presented in this paper. A CPW vertical transition is designed in order to provide input/output access to the device. Biasing components are also integrated in the same substrate and accessed through castellated via holes. The proposed filter presents a very compact size and constant fractional bandwidth. Measured results including the effect of the vertical transition show low insertion losses while keeping a constant fractional bandwidth along the tuning range
International audienceThis paper presents the design, the realization and the measurement of a thin-film packaged RF-MEMS switched capacitors. Packaging is included in microelectronics fabrication process, with Silicon Nitride thin film. The capacitors are actuated by deflecting thin gold metal membranes towards the package dielectric, increasing the capacitance by a factor 2.3. The device size, including its packaging, is 50 × 40μm². Pull-in and release voltages have less than 5V variation between 20°C and 85°C. The device has been tested with 20 dBm applied power and shows no sensitivity to incident power
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