We experimentally demonstrate an 100 Gbit/s hybrid optical fiber-wireless link by employing photonic heterodyning up-conversion of optical 12.5 Gbaud polarization multiplexed 16-QAM baseband signal with two free running lasers. Bit-error-rate performance below the FEC limit is successfully achieved for air transmission distances up to 120 cm.

International audienceThis paper presents the design, the realization and the measurement of a thin-film packaged RF-MEMS switched capacitors. Packaging is included in microelectronics fabrication process, with Silicon Nitride thin film. The capacitors are actuated by deflecting thin gold metal membranes towards the package dielectric, increasing the capacitance by a factor 2.3. The device size, including its packaging, is 50 × 40μm². Pull-in and release voltages have less than 5V variation between 20°C and 85°C. The device has been tested with 20 dBm applied power and shows no sensitivity to incident power

This paper presents the design, the realization and the measurement of a thin-film packaged RF-MEMS switched capacitors. Packaging is included in microelectronics fabrication process, with Silicon Nitride thin film. The capacitors are actuated by deflecting thin gold metal membrane towards the package dielectric, increasing the capacitance by a factor 2.47. The device size, including its packaging, is 80 × 90µm 2. The highest quality factor of a single capacitor is 1515 at 5 GHz, which comes from the low parasitic capacitance and the thick metallization. To obtain larger capacitance value, an array of 4 × 2 capacitors has been realized and measured.

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