Ku Band High-Q Tunable Surface-Mounted Cavity Resonator Using RF MEMS Varactors

Stefanini, Romain; Martínez, J.D.; Chatras, Matthieu; Pothier, A.; Boria, Vicente E.; Blondy, Pierre

doi:10.1109/lmwc.2011.2126565

Cited by 24 publications

(13 citation statements)

References 9 publications

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“…radio frequency microelectromechanical (RF MEMS) system switches [1]- [3], ferroelectric materials [4], [5], liquid crystals [6], [7], or semiconductor varactors [8]- [11], which have been reported up to now. Among these techniques, ferroelectric materials and RF MEMS-based tunable structures are expensive, and the fabrication process can also be challenging.…”

mentioning

confidence: 99%

A Controllable Bandwidth Filter Using Varactor-Loaded Metamaterial-Inspired Transmission Lines

Borja

Carbonell

Martínez

et al. 2011

Antennas Wirel. Propag. Lett.

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This letter presents a tunable bandwidth bandpass filter based on varactor-loaded metamaterial coplanar waveguide (CPW) lines. The CPW lines are based on series gaps and split-ring resonators. The varactors are reverse-biased semiconductor diodes connected between both sides of each series gap. This configuration, directly inspired from the so-called metamaterial technology, takes advantage of the high dispersion of the loaded transmission line. Therefore, strong permittivity and permeability responses induced by means of the resonators are obtained. A single varactor-loaded transmission line is first analyzed. Then, a third-order tunable filter with fractional bandwidth tuning range from 5.8% to 21.5% is experimentally assessed. The proposed filters can be used in several practical applications such as multichannel wireless and satellite communication systems, where reconfigurable devices are often required.

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mentioning

confidence: 99%

A Controllable Bandwidth Filter Using Varactor-Loaded Metamaterial-Inspired Transmission Lines

Borja

Carbonell

Martínez

et al. 2011

Antennas Wirel. Propag. Lett.

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“…The measured Q-factor is between 500 and 800 for a tuning range of 500 MHz around 5 GHz. Similar results have been also achieved in [58], where a high-Q tunable resonator, which consists on a brass surface mountable cavity, can be tuned using RF MEMS varactors (i.e. electrostatic curled cantilever).…”

Section: Tunable Microwave Filterssupporting

confidence: 72%

“…Achieving a widely tunable, low power and high-Q resonator with good spurious free range in compact implementations has been demonstrated with the evanescent-mode cavity technology employing different solutions, as it can be seen in [57][58][59][60][61][62]. Piezoelectric actuator or RF MEMS capacitive/resistive switch could be employed to tune centre frequency and to control coupling coefficients.…”

Section: Tunable Microwave Filtersmentioning

confidence: 99%

Substrate Integrated Coaxial Filters with Fixed and Tunable Responses

Sirci¹

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“…For high‐frequency applications, the micromachined inductor quality factor is the bottleneck of the overall quality factor ( Q ) of the LC tank [ Ketterl et al ., ]. The inductive transmission line [ Yu et al ., ] or cavity resonators [ Mercier et al , ; Stefanini et al , ] are preferable for the high‐ Q factors with respect to spiral or lumped inductors.…”

Section: Introductionmentioning

confidence: 99%

MEMS‐based LC tank with extended tuning range for multiband applications

Cazzorla

Farinelli²,

Urbani³

et al. 2016

Radio Science

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This paper presents the modeling, simulations, and measurements of a compact multiband microelectromechanical (MEMS)‐based LC tank resonator suitable for low phase noise voltage‐controlled oscillators (VCOs). The resonator is based on a high‐Q spiral inductor and high capacitance ratio varicap fully integrated in FBK‐irst (Fondazione Bruno Kessler) MEMS manufacturing process. The design of the varicap is based on double‐actuation mechanism with a mechanical central bond that inhibits the pull‐in allowing for a theoretically infinite tuning ratio. The measurements have shown a total not continuous capacitance ratio (Cr) of 5.2 with a continuous variation of the capacitance values in the range 225 fF–600 fF which corresponds to a continuous capacitance ratio (Cr*) of 2.6. The performance repeatability, the power‐handling capability, and the stability over time were tested on 10 samples showing a negligible variation of the capacitance values. The spiral inductor consists of a suspended gold membrane thick 5 µm in a circular shape which was modeled in order to optimize the quality factor (Q) in the frequency range 2–4 GHz. The measurement results show a Q of about 55 in the 2–4 GHz frequency band. The LC tank measurements show an overall tuning range better than of 45% in the 3.2–4.9 GHz frequency band, consisting of two continuous tuning ranges of 7.5% and 25%. The LC tank allowed the design of MEMS‐based voltage‐controlled oscillators (VCOs) with an overall tuning better than 60% in the frequency range 2.15 GHz–3.85 GHz and two separate regions of continuous tuning range. The VCO prototype will be fabricated on Surface Mount Technology on RO4350 laminate. The main figures of merit are presented in comparison with the state of the art.

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Ku Band High-Q Tunable Surface-Mounted Cavity Resonator Using RF MEMS Varactors

Cited by 24 publications

References 9 publications

A Controllable Bandwidth Filter Using Varactor-Loaded Metamaterial-Inspired Transmission Lines

A Controllable Bandwidth Filter Using Varactor-Loaded Metamaterial-Inspired Transmission Lines

Substrate Integrated Coaxial Filters with Fixed and Tunable Responses

MEMS‐based LC tank with extended tuning range for multiband applications

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