a) Corresponding authors: ignasifinamartinez@gmail.com, fsanchez@icmab.es SrTiO3 templates have been used to integrate epitaxial bilayers of ferroelectric Hf0.5Zr0.5O2 and La2/3Sr1/3MnO3 bottom electrode on Si(001). The Hf0.5Zr0.5O2 films show enhanced properties in comparison to equivalent films on SrTiO3(001) single crystalline substrates. The films, thinner than 10 nm, have very high remnant polarization of 34 µC/cm 2 . Hf0.5Zr0.5O2 capacitors at operating voltage of 4 V present long retention time well beyond 10 years and high endurance against fatigue up to 10 9 cycles. The robust ferroelectric properties displayed by the epitaxial Hf0.5Zr0.5O2 films on Si(001) using SrTiO3 templates paves the way for the monolithic integration on silicon of emerging memory devices based on epitaxial HfO2.
We report a method to fabricate functional oxide nanostructures ordered over the centimeter scale. Self-assembly of SrTiO3(001) chemical terminations through appropriate thermal processing leads to large-area chemical nanopattering of the surface. Such nanopatterned surfaces, stable at relatively high temperature, can be used as template to grow functional ordered nanostructures, exploiting the termination-dependent nucleation. As an example of this potential, we have fabricated ordered arrays of conducting epitaxial SrRuO3 nanostripes separated by insulating trenches. Conductivity maps by atomic force microscopy confirm the coexistence of sharp conducting/insulating regions in low-dimensional structures.
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