The aim of this work is to characterize the strength properties of polycrystalline silicon (polysilicon) with the use of tensile and bending test specimens. The strength of thin polysilicon films with different geometry, size and stress concentrations has been measured and correlated with the effective size of the specimen and its stress distribution. The test results are evaluated using a probabilistic strength approach based on the weakest link theory with the use of STAU software. The use of statistic methods of strength prediction of polysilicon test structures with a complex geometry and loading based on test values for standard material tests specimen has been evaluated
Inorganic-organic hybrid polymers (ORMOCE®s) combine very good optical and dielectricproperties in the frequency range up to 1 MHz (εr = 3.1 and tanδ = 0.004, both at 1 MHz). Thisis particularly promising for electro-optical (e/o) applications. Multi-layer microwave circuits forhigh frequency applications up to 100 GHz demand extraordinary material properties such as alow permittivity εr < 3 and a dielectric loss tanδ of about 10-3. For low-cost processing, direct UVpatterning would be particularly advantageous. Additionally, the material should be thermallystable at least up to temperatures around 300°C.We have developed a series of novel ORMOCE® materials for high frequency applications.Using these ORMOCE®s, thick film coatings (up to 150 m) can be produced and directlypatterned by UV lithography with sufficiently high resolution. The synthesis has been carried outusing styrene-substituted organosilanes and silanediols as precursors reacted by simplified solgel-processing in combination with organic cross-linking of polymerizable organic functions.The materials have been characterized at high frequencies up to 40 GHz, exhibiting verypromising dielectric properties of εr = 2.5 and tanδ = 0.0035.
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