In most animal species, vision is mediated by compound eyes, which offer lower resolution than vertebrate single-lens eyes, but significantly larger fields of view with negligible distortion and spherical aberration, as well as high temporal resolution in a tiny package. Compound eyes are ideally suited for fast panoramic motion perception. Engineering a miniature artificial compound eye is challenging because it requires accurate alignment of photoreceptive and optical components on a curved surface. Here, we describe a unique design method for biomimetic compound eyes featuring a panoramic, undistorted field of view in a very thin package. The design consists of three planar layers of separately produced arrays, namely, a microlens array, a neuromorphic photodetector array, and a flexible printed circuit board that are stacked, cut, and curved to produce a mechanically flexible imager. Following this method, we have prototyped and characterized an artificial compound eye bearing a hemispherical field of view with embedded and programmable low-power signal processing, high temporal resolution, and local adaptation to illumination. The prototyped artificial compound eye possesses several characteristics similar to the eye of the fruit fly Drosophila and other arthropod species. This design method opens up additional vistas for a broad range of applications in which wide field motion detection is at a premium, such as collision-free navigation of terrestrial and aerospace vehicles, and for the experimental testing of insect vision theories.

We propose a microoptical approach to ultra-compact optics for real-time vision systems that are inspired by the compound eyes of insects. The demonstrated module achieves approx. VGA resolution with a total track length of 1.4 mm which is about two times shorter than comparable single-aperture optics on images sensors of the same pixel pitch. The partial images that are separately recorded in different optical channels are stitched together to form a final image of the whole field of view by means of image processing. A software correction is applied to each partial image so that the final image is made free of distortion. The microlens arrays are realized by state of the art microoptical fabrication techniques on wafer-level which are suitable for a potential application in high volume e.g. for consumer electronic products.

Self-organized nanostructures that provide antireflection properties grow on PMMA caused by plasma ion etching. A new procedure uses a thin initial layer prior to the etching step. Different types of antireflective structures can now be produced in a shorter time and with fewer limitations on the type of polymer that can be used. The durability of the structured surfaces can be improved by the deposition of additional thin films.

Wafer-level optics is considered as a cost-effective approach to miniaturized cameras, because fabrication and assembly are carried out for thousands of lenses in parallel. However, in most cases the micro-optical fabrication process is not mature enough to reach the required accuracy of the optical elements, which may have complex profiles and sags in the mm-scale. Contrary, the creation of microlens arrays is well controllable so that we propose a multi aperture system called "Optical Cluster Eye" which is based on conventional micro-optical fabrication techniques. The proposed multi aperture camera consists of many optical channels each transmitting a segment of the whole field of view. The design of the system provides the stitching of the partial images, so that a seamless image is formed and a commercially available image sensor can be used. The system can be fabricated on wafer-level with high yield due to small aperture diameters and low sags. The realized optics has a lateral size of 2.2 × 2.9 mm2, a total track length of 1.86 mm, and captures images at VGA video resolution.

The demand for bendable sensors increases constantly in the challenging field of soft and micro-scale robotics. We present here, in more detail, the flexible, functional, insect-inspired curved artificial compound eye (CurvACE) that was previously introduced in the Proceedings of the National Academy of Sciences (PNAS, 2013). This cylindrically-bent sensor with a large panoramic field-of-view of 180° × 60° composed of 630 artificial ommatidia weighs only 1.75 g, is extremely compact and power-lean (0.9 W), while it achieves unique visual motion sensing performance (1950 frames per second) in a five-decade range of illuminance. In particular, this paper details the innovative Very Large Scale Integration (VLSI) sensing layout, the accurate assembly fabrication process, the innovative, new fast read-out interface, as well as the auto-adaptive dynamic response of the CurvACE sensor. Starting from photodetectors and microoptics on wafer substrates and flexible printed circuit board, the complete assembly of CurvACE was performed in a planar configuration, ensuring high alignment accuracy and compatibility with state-of-the art assembling processes. The characteristics of the photodetector of one artificial ommatidium have been assessed in terms of their dynamic response to light steps. We also characterized the local auto-adaptability of CurvACE photodetectors in response to large illuminance changes: this feature will certainly be of great interest for future applications in real indoor and outdoor environments.

Stochastic subwavelength structures on polymethylmetacrylate (PMMA) surfaces were produced by low‐pressure argon/oxygen plasma treatment. The modified surfaces show antireflective properties exhibiting low scattering losses depending on the size and the density of the structure. It is demonstrated that the antireflection performance is a function of the mean ion energy and working pressure that are controllable by process parameters, namely plasma power and gas flow. A model is suggested that assumes a self‐assembling etch mask as reason for the growth of the pins with about 70–90 nm in lateral dimension and up to 600 nm in height.

In this study, a miniature artificial compound eye (15 mm in diameter) called the curved artificial compound eye (CurvACE) was endowed for the first time with hyperacuity, using similar micro-movements to those occurring in the fly's compound eye. A periodic micro-scanning movement of only a few degrees enables the vibrating compound eye to locate contrasting objects with a 40-fold greater resolution than that imposed by the interommatidial angle. In this study, we developed a new algorithm merging the output of 35 local processing units consisting of adjacent pairs of artificial ommatidia. The local measurements performed by each pair are processed in parallel with very few computational resources, which makes it possible to reach a high refresh rate of 500 Hz. An aerial robotic platform with two degrees of freedom equipped with the active CurvACE placed over naturally textured panels was able to assess its linear position accurately with respect to the environment thanks to its efficient gaze stabilization system. The algorithm was found to perform robustly at different light conditions as well as distance variations relative to the ground and featured small closed-loop positioning errors of the robot in the range of 45 mm. In addition, three tasks of interest were performed without having to change the algorithm: short-range odometry, visual stabilization, and tracking contrasting objects (hands) moving over a textured background.

The combination of a 10.6 μm main pulse CO2 laser and a 1064 nm pre-pulse Nd:YAG laser in EUV source concepts for HVM would require collector mirrors with an integrated spectral purity filter that suppresses both laser wavelengths. This paper discusses a new approach of a dual-wavelength spectral purity filter to suppress 10.6 μm and 1064 nm IR radiation at the same time. The dual-wavelength spectral purity filter combines two binary phase gratings that are optimized for 10.6 μm and 1064 nm, respectively. The dual phase grating structure has been realized on spherical sub-aperture EUV collector mirrors having an outer diameter of 150 mm. IR suppression factors of 260 at 10.6 μm and 620 at 1064 nm have been measured on the sub-aperture EUV collector while its EUV reflectance exceeded 64 % at 13.5 nm