2007
DOI: 10.1002/ppap.200732103
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Broadband Antireflective Structures on PMMA by Plasma Treatment

Abstract: Stochastic subwavelength structures on polymethylmetacrylate (PMMA) surfaces were produced by low‐pressure argon/oxygen plasma treatment. The modified surfaces show antireflective properties exhibiting low scattering losses depending on the size and the density of the structure. It is demonstrated that the antireflection performance is a function of the mean ion energy and working pressure that are controllable by process parameters, namely plasma power and gas flow. A model is suggested that assumes a self‐as… Show more

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Cited by 20 publications
(21 citation statements)
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“…To realize the FHS ( Figure ), a micropatterned flexible substrate were fabricated by oxygen plasma treatment of pre‐cleaned PET. Polymer films are composed of semi‐crystalline and amorphous regimes, which etch at different rates under plasma treatment . Due to the different etching rate, micropatterns are formed on the polymer surface spontaneously .…”
Section: Resultsmentioning
confidence: 99%
“…To realize the FHS ( Figure ), a micropatterned flexible substrate were fabricated by oxygen plasma treatment of pre‐cleaned PET. Polymer films are composed of semi‐crystalline and amorphous regimes, which etch at different rates under plasma treatment . Due to the different etching rate, micropatterns are formed on the polymer surface spontaneously .…”
Section: Resultsmentioning
confidence: 99%
“…g., [51][52][53][54][55][56][57][58]) that depending on the substrate material and treatment conditions (pressure, ion During the etching process, not only the morphology, but also surface chemical structure is altered. Therefore, in order to produce surfaces with the desired chemical composition, roughened surfaces are coated by thin films of plasma polymers with required properties.…”
Section: Deposition Of Plasma Polymers On Stochastically-roughened Sumentioning
confidence: 99%
“…Early reports on motheye structures deal with periodic profiles 24 . More recent investigations have shown, that stochastic motheye structures on polymer surfaces can be prepared by a plasma etching process in high vacuum 25 .…”
Section: Motheye-structures As Low Effective-index Films For Antireflmentioning
confidence: 99%