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Crystallization of GaN by hydride vapor phase epitaxy (HVPE) on ammonothermally grown GaN seed crystals is described. The initial growth conditions for HVPE are determined and applied for further bulk growth. Smooth GaN layers up to 1.1 mm thick and of excellent crystalline quality, without cracks, and with low dislocation density are obtained. Preparation of the free-standing HVPE-GaN crystal by slicing and structural and optical quality of the resulting wafer are presented.

Phone: þ48 22 814 02 07, Fax: þ48 22 811 56 07We are presenting some physical and chemical basis of ammonothermal method of bulk gallium nitride (GaN) synthesis in ammonobasic route. The substrates of polar, non-polar, and semi-polar orientation can be obtained by this method. Excellent structural and wide spectrum of electrical parameters of truly bulk GaN crystals obtained this way are revealed. Large progress in manufacturing of large size (1-in.) non-polar ammonothermal crystals is reported. A preliminary results on performance of the devices grown on ammonothermal GaN substrates will be shown.

In this paper we review the developments of producing non-polar (i.e. m-plane and a-plane) and semi-polar (i.e. (20.1)-plane) wafers by ammonothermal method. The growth method and polishing results are described. We succeeded in producing 26 mm × 26 mm non-and semi-polar wafers. These wafers possess outstanding structural and optical properties, with threading dislocation density of the order of 10 4 cm −3 . Detailed studies of homoepitaxial layers, as well as AlGaN heterostructures are also presented, showing the potential of studied ammonothermal substrates in the fabrication of optoelectronic devices.

Perspectives about growth of bulk gallium nitride crystals, fabricating high structural quality gallium nitride wafers and the market demand for them are presented. Three basic crystal growth technologies, halide vapor phase epitaxy, sodium flux, and ammonothermal, are described. Their advantages and disadvantages, recent development, and possibilities are discussed. The main difficulty with crystallization of thick GaN is determined. Some new solutions for bulk growth are proposed. It is shown that only crystallization on high structural quality native seeds will ensure proper progress. New ideas for fabricating gallium nitride crystals and wafers with a better control of their structural properties and point defect concentration are proposed.

In this letter, the authors demonstrate large size m-plane GaN substrates grown by ammonothermal method. These substrates have excellent structural quality. The concentration of threading dislocation density is below 5×104 cm−2 and the full width at half maximum for the symmetrical and asymmetrical peaks equals 16 and 19 arc sec, respectively. Also good optical quality, the energy gap-related transition is clearly observed at room temperature in photoluminescence and contactless electroreflectance spectra. GaN epilayers deposited on these substrates exhibit intrinsic narrow exciton lines which are very sensitive to the optical selection rules typical for hexagonal symmetry, proving truly nonpolar character of the material.

It is demonstrated in this paper that 1.9-mm-thick gallium nitride grown by Hydride Vapor Phase Epitaxy (HVPE) on an ammonothermally grown GaN seed can reproduce the structural, in terms of defects, properties of the seed. The etch pit density and its correlation to the threading dislocation density in the ammonothermal GaN substrate and the HVPEGaN layer is presented and analyzed. However, it has recently been observed that for HVPE-GaN thicker than 2 mm some additional defects are formed in the new grown material. Therefore, three HVPE growth runs were performed in the same experimental conditions, using three structurally identical ammonothermally grown GaN seeds of different thicknesses. The influence of the thickness of the seeds on the crystallization process and the properties of the HVPE-GaN layers is shown and discussed.