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SPONSORING/MONITORING AGENCY NAME(S) AND ADDRESS(ES) 10. SPONSOR/MONITOR'S ACRONYM(S)____ ___ ___
20061130042
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ABSTRACTThe monolithic integration of a Fabry-Perot interferometer and a (100) silicon photodiode is reported for use as a highly sensitive transduction method in the detection of minute displacements of a proof mass attached to a spring. The combination results in a compact device with active transistor-like amplification and minimal parasitic elements. The transducer is fabricated using standard surface micromachining techniques. The finesse of the optical cavity, incident optical power, and geometry of the mirror and support structure control the sensitivity of the transducer. A transduction of more than 2285 A/m, percent change in transmission with displacement of 3%/nm, small-signal voltage amplification of 460 VN output resistance of 100 M0 and transconductance of I mA/V have been obtained thus far for a single device without amplification.
The temperature dependence of field emission through thermally grown silicon dioxide (SiO2) on n-type 4H and 6H silicon carbide (SiC) substrates is reported. Room-temperature SiO2/SiC barrier heights, ΦB, of 1.92 and 2.12 V are extracted for the 4H– and 6H–SiC samples, respectively, using a Fowler–Nordheim analysis. Barrier heights of 2.2 and 2.4 V along with a linear temperature-dependent barrier height lowering, ΔΦB/ΔT, of 2.4 and 2.0 mV/K for 4H– and 6H–SiC are extracted using an alternative analytical expression for tunneling from semiconducting substrates derived previously. In both analyses, the temperature-dependent flatband voltage, using the measured room-temperature value, was included.
Fowler–Nordheim tunneling of holes through thermally grown silicon dioxide on 6H–silicon carbide is reported. Oxides of 5.2, 10, and 14.2 nm thickness were grown on the p+ face of a p+n SiC junction. The p+n junction served to separate the electron and hole tunneling currents. Hole tunneling was found to be the dominant current mechanism through the oxide. Fowler–Nordheim analysis, using a parabolic E–K relationship, was performed to extract a barrier height–effective mass product, ΦB3/2(mox/m0)1/2, for electrons and holes of 2.88%±4.9% and 2.38%±3.8% (V3/2) respectively. An estimate for the effective mass of holes within the oxide was made using both the parabolic and Franz dispersion relations.
A novel gyroscope design is presented that has potential to reach navigation-grade performance, i.e. bias instability < 0.01 °/hr and Angle Random Walk (ARW) < 0.001 °/√hr. The design is based on the incorporation of an optical transduction mechanism used to decouple drive and sense signals, a dual crystalline silicon spring fabrication approach along with a large drive mass and small sense mass to enhance Coriolis displacement. I.
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