Micromachined Fabry–Perot interferometer for motion detection

Abstract

1 he public reporting burden tor tnis collection ot Intormatlon is estimateo to average 1 hour per response, including the time tor reviewing instructions, searching existing oata sources, gatnenng and maintaining the data needed, and completing and reviewing the collection of information. SPONSORING/MONITORING AGENCY NAME(S) AND ADDRESS(ES) 10. SPONSOR/MONITOR'S ACRONYM(S)____ ___ ___ 20061130042 DISTRIBUTIONIAVAILABILITY STATEMENTApproved for public release; distribution is unlimited. SUPPLEMENTARY NOTESThis is the work of the United States Government and therefore is not copyrighted. This work may be copied and disseminated without restriction. Many SSC San Diego public release documents are available in electronic format at: http://www.spawar.navy.mil/sti/publications/pubs/index.html ABSTRACTThe monolithic integration of a Fabry-Perot interferometer and a (100) silicon photodiode is reported for use as a highly sensitive transduction method in the detection of minute displacements of a proof mass attached to a spring. The combination results in a compact device with active transistor-like amplification and minimal parasitic elements. The transducer is fabricated using standard surface micromachining techniques. The finesse of the optical cavity, incident optical power, and geometry of the mirror and support structure control the sensitivity of the transducer. A transduction of more than 2285 A/m, percent change in transmission with displacement of 3%/nm, small-signal voltage amplification of 460 VN output resistance of 100 M0 and transconductance of I mA/V have been obtained thus far for a single device without amplification.

Design of a tunable Fabry-Perot interferometer/photodiode (FPI/PD) spectral image sensor in visible wavelength range

“…Our design should at least meet the requirement of such a microprocessor. Several FPI/PD systems using surface micromachining technology have been reported [16][17][18] . However, they operated at only a single wavelength or in a narrow wavelength range.…”

An optomechanical accelerometer with a high-finesse hemispherical optical cavity

“…Fabry-Pérot interferometry has been previously demonstrated in a number of MEMS accelerometers. This work can be broken into two groups: fiber-optic cavities [1][2][3][4][5] and vertically oriented cavities [6][7][8]. The first uses an optical fiber to deliver and collect light while also serving as one mirror of the cavity.…”

Optical Properties of One-Dimensional Binary Plasma Dielectric Photonic Crystal

“…The technologies applications of PPC are now expanding widely as, for example, in plasma lens [8], plasma antenna [9], plasma stealth aircraft [10][11][12][13], etc. And the reflectionless transmission due to the Fabry-Perot resonance in PPC can be applied to frequency filters [14] and interferometers [15]. Moreover, PPC has not only the characteristics of photonic crystal, but also the characteristics of plasma.…”