In this paper, a mesoporous γ-alumina membrane coated on a macroporous α-alumina support via sol-gel method has been reported. A crack-free γ-alumina membrane was obtained by adding PVA to the alumina solution and optimum parameters of roughness, temperature and porosity were achieved. The support was dip-coated in different solutions using two new different solvents with different particle size distributions. Using these two solvents led to the uniform distribution of pore size in the final membrane. The alumina sols showed particle size distributions in the range of 20 to 55 nm which was measured by a DLS Zeta Sizer. X-ray diffraction technique, atomic force microscopy and scanning electron microscopy were used to characterize the membrane layer. XRD and DTA data for the γ-alumina membrane showed its thermal stability up to around 600°C. The thickness of the mesoporous γ-alumina membrane was about 4 µm with 16 nm of surface roughness and 5 nm pore size. The resultant crack-free mesoporous membrane shows that the membrane preparation procedure was optimum. In this work, it has been investigated the performance of γ-alumina membranes for single gas permeation and separation of binary gas mixtures.
Motivated by the current introduction of extreme ultraviolet lithography (EUVL) into chip manufacturing processes, and thus the transition to electron-induced chemistry within the respective resist materials, we have studied low...
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