Silicon pore optics is a technology developed to enable future large area X-ray telescopes, such as the International Xray Observatory (IXO), a candidate mission in the ESA Space Science Programme 'Cosmic Visions 2015-2025'. IXO uses nested mirrors in Wolter-I configuration to focus grazing incidence X-ray photons on a detector plane. The IXO mirrors will have to meet stringent performance requirements including an effective area of ~3 m 2 at 1.25 keV and ~1 m 2 at 6 keV and angular resolution better than 5 arc seconds. To achieve the collecting area requires a total polished mirror surface area of ~1300 m 2 with a surface roughness better than 0.5 nm rms. By using commercial high-quality 12" silicon wafers which are diced, structured, wedged, coated, bent and stacked the stringent performance requirements of IXO can be attained without any costly polishing steps. Two of these stacks are then assembled into a co-aligned mirror module, which is a complete X-ray imaging system. Included in the mirror module are the isostatic mounting points, providing a reliable interface to the telescope. Hundreds of such mirror modules are finally integrated into petals, and mounted onto the spacecraft to form an X-ray optic of four meters in diameter. In this paper we will present the silicon pore optics assembly process and latest X-ray results. The required metrology is described in detail and experimental methods are shown, which allow to assess the quality of the HPOs during production and to predict the performance when measured in synchrotron radiation facilities.

The next generation astronomical X-ray telescopes (such as the X-ray Evolving Universe Spectroscopy mission XEUS) require extremely large collecting areas (effective area of ~10 m 2 at 1 keV) in combination with good angular resolution of ~5" or better. The existing technologies such as polished glass and nickel electroforming would lead to excessively heavy and expensive optics, and/or are not able to produce the required large area. We have developed an entirely novel technology for producing X-ray optics which results in very light, stiff and modular optics. These can be assembled into almost arbitrarily large apertures and are perfectly suited for future astrophysics missions such as XEUS. Indeed this crucial technology ensures that the ambitious mission profile is actually feasible. The technology makes use of commercially available silicon wafers from the semiconductor industry. The latest generation of 12 inch silicon wafers have a surface roughness that is sufficiently low (~0.3 nm) for X-ray reflection, are plan-parallel to better than a micrometer, have almost perfect mechanical properties and are considerably cheaper than other high-quality optical materials. The wafers are bent into an accurate cone and assembled to form a stiff pore structure. The resulting light and stiff modules, which we term a High-performance Pore Optics (HPO), form a small segment of a Wolter-I optic, and are easily assembled into a modular optic with large collecting area. We have implemented an automated production process of HPOs on laboratory scale and describe facilities developed with ESA at the Cosine Research Centre. We present the status of the production and the results obtained with this highly innovative technology at the synchrotron radiation facilities of PTB at BESSY which indicate an excellent X-ray imaging performance coming close to the XEUS requirements for imaging resolution and mirror mass.

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Silicon Pore Optics (SPO) has been established as a new type of x-ray optics that enables future x-ray observatories such as Athena. SPO is being developed at cosine with the European Space Agency (ESA) and academic and industrial partners. The optics modules are lightweight, yet stiff, high-resolution x-ray optics, that shall allow missions to reach an unprecedentedly large effective area of several square meters, operating in the 0.2 to 12 keV band with an angular resolution better than 5 arc seconds. In this paper we are going to discuss the latest generation production facilities and we are going to present results of the production of mirror modules for a focal length of 12 m, including x-ray test results.