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In the past, the formation of microscale patterns in the far field by light has been diffractively limited in resolution to roughly half the wavelength of the radiation used. Here, we demonstrate lines with an average width of 36 nanometers (nm), about one-tenth the illuminating wavelength lambda1 = 325 nm, made by applying a film of thermally stable photochromic molecules above the photoresist. Simultaneous irradiation of a second wavelength, lambda2 = 633 nm, renders the film opaque to the writing beam except at nodal sites, which let through a spatially constrained segment of incident lambda1 light, allowing subdiffractional patterning. The same experiment also demonstrates a patterning of periodic lines whose widths are about one-tenth their period, which is far smaller than what has been thought to be lithographically possible.

Recently, there has been an explosion of interest in metalenses for imaging. The interest is primarily based on their sub-wavelength thicknesses. Diffractive lenses have been used as thin lenses since the late 19 th century. Here, we show that multi-level diffractive lenses (MDLs), when designed properly can exceed the performance of metalenses. Furthermore, MDLs can be designed and fabricated with larger constituent features, making them accessible to low-cost, large area volume manufacturing, which is generally challenging for metalenses. The support substrate will dominate overall thickness for all flat optics. Therefore the advantage of a slight decrease in thickness (from ~2λ to ~λ/2) afforded by metalenses may not be useful. We further elaborate on the differences between these approaches and clarify that metalenses have unique advantages when manipulating the polarization states of light.

We exploit the inherent dispersion in diffractive optics to demonstrate planar chromatic-aberration-corrected lenses. Specifically, we designed, fabricated and characterized cylindrical diffractive lenses that efficiently focus the entire visible band (450 nm to 700 nm) onto a single line. These devices are essentially pixelated, multi-level microstructures. Experiments confirm an average optical efficiency of 25% for a three-wavelength apochromatic lens whose chromatic focus shift is only 1.3 μm and 25 μm in the lateral and axial directions, respectively. Super-achromatic performance over the continuous visible band is also demonstrated with averaged lateral and axial focus shifts of only 1.65 μm and 73.6 μm, respectively. These lenses are easy to fabricate using single-step grayscale lithography and can be inexpensively replicated. Furthermore, these devices are thin (<3 μm), error tolerant, has low aspect ratio (<1:1) and offer polarization-insensitive focusing, all significant advantages compared to alternatives that rely on metasurfaces. Our design methodology offers high design flexibility in numerical aperture and focal length, and is readily extended to 2D.

We demonstrate imaging over the visible band using a single planar diffractive lens. This is enabled via multi-level diffractive optics that is designed to focus over a broad wavelength range, which we refer to as an achromatic diffractive lens (ADL). We designed, fabricated and characterized two ADLs with numerical apertures of 0.05 and 0.18. Diffraction-limited focusing is demonstrated for the NA = 0.05 lens with measured focusing efficiency of over 40% across the entire visible spectrum (450 nm to 750 nm). We characterized the lenses with a monochromatic and a color CMOS sensor, and demonstrated video imaging under natural sunlight and other broadband illumination conditions. We use rigorous electromagnetic simulations to emphasize that ADLs can achieve high NA (0.9) and large operating bandwidth (300 nm in the visible spectrum), a combination of metrics that have so far eluded other flat-lens technologies such as metalenses. These planar diffractive lenses can be cost-effectively manufactured over large areas and thereby, can enable the wide adoption of flat, low-cost lenses for a variety of imaging applications.

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We present an extension of the direct-binary-search algorithm for designing high-efficiency multi-wavelength diffractive optics that reconstruct in the Fresnel domain. A fast computation method for solving the optimization problem is proposed. Examples of three-wavelength diffractive optics with over 90% diffraction efficiency are presented. These diffractive optical elements reconstruct three distinct image patterns when probed using the design wavelengths. Detailed parametric and sensitivity studies are conducted, which provide insight into the diffractive optic's performance when subject to different design conditions as well as common systematic and fabrication errors.

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