Single crystal AlN provides a native substrate for Al-rich AlGaN that is needed for the development of efficient deep ultraviolet light emitting and laser diodes. An absorption band centered around 4.7 eV (∼265 nm) with an absorption coefficient above 1000 cm−1 is observed in these substrates. Based on density functional theory calculations, substitutional carbon on the nitrogen site introduces absorption at this energy. A series of single crystalline wafers were used to demonstrate that this absorption band linearly increased with carbon, strongly supporting the model that CN- is the predominant state for carbon in AlN.

No abstract

The structural and optical quality of a freestanding AlN substrate prepared from a thick AlN layer grown by hydride vapor phase epitaxy (HVPE) on a bulk (0001)AlN substrate prepared by physical vapor transport (PVT) were investigated. The prepared HVPE-AlN substrate was crack- and stress-free. High-resolution X-ray diffraction ω-rocking curves of symmetric (0002) and skew-symmetric (1011) reflections had small full widths at half maximum (FWHMs) of 31 and 32 arcsec, respectively. Deep-ultraviolet optical transparency of the HVPE-AlN substrate was higher than that of the PVT-AlN substrate, which was related to lower concentrations of C, O impurities, and Al vacancy.

As the building blocks of deep UV light emitting diode (LED) technology and high‐power electronic devices, AlGaN alloys have attracted considerable attention. In this study, AlGaN films with varying compositions doped with Si were deposited on homoepitaxial AlN layers grown on AlN single crystal substrates. The room temperature resistivity of AlGaN alloys of different compositions grown on AlN and sapphire substrates with a constant Si doping level of 6x1018 cm‐3 was compared. AlGaN films grown on AlN substrates consistently exhibited a lower n‐type resistivity than those grown on sapphire. An n‐type resistivity of 0.1 Ω cm was obtained for an AlGaN film with 80% Al content and a sheet resistance of 235 Ω/sq. for an AlGaN film with 70% Al content. The carrier activation energy as a function of Al content in AlGaN for these n‐type films was measured. For compositions below 80% Al, the activation energy was around 15 meV due to impurity potential screening. For higher Al compositions, the carrier concentration was limited by a high compensation ratio, except for AlN, which has activation energy of 250 meV. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

No abstract