Polycrystalline Ti02surface reconstruction in oxygen atmosphere has been investigated by atomic force microscopy (AFM) and cathodoluminescence in the scanning electron microscopy (SEM-CL). The reactivity to oxygen is related to the presence of defects as interstitial Ti ions, that iuduce growth of protrusions, large terraces and polygonal shaped structures.
This paper present3 the descnption, the technological steps, the specific process of fabn-eation of a multichannel "croprobe for recordindshmulation the neuraVmuscdiu activity. Few problems of amkotropic etching are anal' ed n e CompatibiZiy befween the matenah used in the semkonductor fabn'cation and the human body is andyed n e fialgoalis the treawent of chronic pan in a closed hop scheme of electiic recording and stimulation h the b k .
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