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Thermal evaporated Barium titanate (BaTiO3) thin films were prepared on to well cleaned glass substrates under the vacuum of 2 x10-5 torr, using 12A4 Hind Hivac coating unit from the BaTiO3 nanoparticles synthesized by using wet chemical method. The thickness of the film was measured by Quartz crystal monitor. From X-ray analysis, it has been found that the deposited film was polycrystalline in nature. SEM analysis revealed that grains of various sizes having tetragonal shape were uniformly distributed throughout the surface of the film. The dependence of capacitance and loss factor on frequency and temperature were investigated and results are discussed.

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