In the paper, the hardness of silicon is wrongly stated as 850 kg mm2, where this should read 8500 kg mm2. In addition, the typical standard deviation of the distribution of the summit heights in the Greenwood–Williamson model has been overestimated, and should read about 1 nm instead of 3 nm. The result is that the calculated plasticity index becomes smaller, and hence the paper overestimates the amount of plastic deformation that occurs in silicon MEMS contacting surfaces. The value of the plasticity index with the new numbers becomes now 2.6 instead of the 22 reported in the original paper. This is fairly close to 1.0 which is the lower limit of `mainly plastic deformation'. The remark that for a true understanding of the deformation mode at the contact interface one should employ computer modeling as in [23] is therefore really important.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
hi@scite.ai
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.