On-chip interconnects over an orthogonal grid of grounded shielding lines on the silicon substrate are characterized by full-wave electromagnetic simulation. The analysis is based on a unit cell of the periodic shielded interconnect structure. It is demonstrated that the shielding structure may help to significantly enhance the transmission characteristics of on-chip interconnects particularly in analog and mixed-signal integrated circuits with bulk substrate resistivity on the order of 10 -cm.Simulation results for the extracted transmission line parameters show a significant decrease in the frequency-dependence of the distributed shunt capacitance as well as decrease in shunt conductance with the shielding structure present, while the series inductance and series resistance parameters are nearly unaffected. An extension of the equivalent circuit model for the shunt admittance of unshielded on-chip interconnects to include the effects of shielding is also presented.
Index Terms-On-chip interconnects, orthogonal gridded shield, periodic structures, shielded MIS microstrip, slow-wave transmission lines.Vijai K. Tripathi (M'68-SM'
A modeling technique for planar microstrip spiral inductors in the presence of lossy media, such as in CMOS and bipolar technologies, is presented. The new model for spiral inductors incorporates the frequency dependent substrate effects via analysis of the the 'skineffect' mode of the microstrip structure.
A b s t m c t 4 n accurate CAD-oriented modeling methodology for multilevel rectangular spiral inductors with enhanced inductance and/or quality factor is presented. The method is based on a distributed equivalent circuit model whose elements are computed using Spectral Domain and Partial Element Equivalent Circuit (PEEC) techniques. Examples of typical two layer spirals in Bi-CMOS and CMOS technologies are presented to illustrate the accuracy of the model as well as the enhanced performance of the multilevel structures.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.