A high-resolution hard x-ray microscope is described. This system is capable of detecting line features as small as 0.6 µm in width, and resolving line pairs 1.2-µm wide and 1.2-µm apart. Three types of two-dimensional image detectors are discussed and compared for use with hard x rays in high resolution. Principles of x-ray image magnification are discussed based on x-ray optics and diffraction physics. Examples of applications are shown in microradiography with fiber reinforced composite materials (SiC in Ti3Al Nb) and in diffraction imaging (topography) with device patterns on a silicon single crystal. High-resolution tomography has now become a reality.
Structural information of special interest to crystal growers and device physicists is now available from high resolution monochromatic synchrotron diffraction imaging (topography). In this review, the importance of superior resolution in momentum transfer and in space is described, and illustrations are taken from a variety of crystals: gallium arsenide, cadmium telluride, mercuric iodide, bismuth silicon oxide, and lithium niobate. The identification and detailed understanding of local variations in crystal growth processes are shown. Finally, new experimental opportunities now available for exploitation are indicated.
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