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Cell adhesion and migration are strongly influenced by extracellular matrix (ECM) architecture and rigidity, but little is known about the concomitant influence of such environmental signals to cell responses, especially when considering cells of similar origin and morphology, but exhibiting a normal or cancerous phenotype. Using micropatterned polydimethylsiloxane substrates (PDMS) with tuneable stiffness (500kPa, 750kPa, 2000kPa) and topography (lines, pillars or unpatterned), we systematically analyse the differential response of normal (3T3) and cancer (SaI/N) fibroblastic cells. Our results demonstrate that both cells exhibit differential morphology and motility responses to changes in substrate rigidiy and microtopography. 3T3 polarization and spreading are influenced by substrate microtopography and rigidity. The cells exhibit a persistent type of migration, which depends on the substrate anisotropy. In contrast, the dynamic of SaI/N spreading is strongly modified by the substrate topography but not by substrate rigidity. SaI/N morphology and migration seem to escape from extracellular cues: the cells exhibit uncorrelated migration trajectories and a large dispersion of their migration speed, which increases with substrate rigidity. Abstract

The brain deformation that occurs during neurosurgery is a serious issue impacting the patient "safety" as well as the invasiveness of the brain surgery. Model-driven compensation is a realistic and efficient solution to solve this problem. However, a vital issue is the lack of reliable and easily obtainable patient-specific mechanical characteristics of the brain which, according to clinicians' experience, can vary considerably. We designed an aspiration device that is able to meet the very rigorous sterilization and handling process imposed during surgery, and especially neurosurgery. The device, which has no electronic component, is simple, light and can be considered as an ancillary instrument. The deformation of the aspirated tissue is imaged via a mirror using an external camera. This paper describes the experimental setup as well as its use during a specific neurosurgery. The experimental data was used to calibrate a continuous model. We show that we were able to extract an in vivo constitutive law of the brain elasticity: thus for the first time, measurements are carried out per-operatively on the patient, just before the resection of the brain parenchyma. This paper discloses the results of a difficult experiment and provide for the first time in vivo data on human brain elasticity. The results point out the softness as well as the highly non-linear behavior of the brain tissue.

In nanoimprint lithography (NIL), one of the key points to be addressed is the printing uniformity on large area. During the process, the silicon mold undergoes significant mechanical stress of different kinds (tension, compression, flexion, and torsion). These stresses are function of the mold design and appear under the concurrent influence of both the applied pressure on the backside of the mold and an opposite force due to the polymer viscoelastic behavior. This translates into non-negligible deformations within patterned or unpatterned zones. This is a major issue because it causes nonuniformity of the printing, mold pattern break and degradation of the polymer surface. In this article, we demonstrate that during the imprint process mold deformations really occur at the local scale of the patterns but also at a larger scale.

Resist modeling is an attractive way to predict the critical dimensions of patterned features after lithographic processing. Unfortunately, previous works have shown that model parameters are very difficult to determine and have often a poor range of validity outside the dataset that have been used to generate them [1,2] . The goal of this work is to assess different simplified resist models using a systematic method. We have studied the accuracy of aerial image model and aerial image plus gaussian noise convolution model. The approach is based on the comparison between simulated and experimental data for periodic lines of various dimensions at various illumination conditions. We also propose a reliable expression for Bossung curves fitting. Using simple physical considerations, the expression has been made very simple and efficient. After a proper setting of the model parameters to the experimental data, mean CD discrepancies between simulation and experiment are as small as 5% and can be 3% for certain feature types. Moreover, we show that simple gaussian noise convolution models can be predictive with the same accuracy. The method for CD prediction is fully described in this paper. Significant improvements have been made in resists modeling over the last several years, but simplified resist models such as "aerial image + gaussian noise " seems to be an effective tool for CD prediction, which remains the major demand of IC manufacturers.

Abstract-This paper reports an exact and explicit representation of the differential operators from Maxwell's equations. In order to solve these equations, the spline basis functions with compact support are used. We describe the electromagnetic analysis of the lamellar grating as an eigenvalues problem. We choose the second degree spline as basis functions. The basis functions are projected onto a set of test functions. We use and compare several test functions namely: Dirac, Pulse and Spline. We show that the choice of the basis and test functions has a great influence on the convergence speed. The outcomes are compared with those obtained by implementing the Finite-Difference Modal Method which is used as a reference. In order to improve the numerical results an adaptive spatial resolution is used. Compared to the reference method, we show a significantly improved convergence when using the spline expansion projected onto spline test functions.

Nanoimprint lithography (NIL) processes have the characteristic that a residual resist layer is always present between the nanoimprinted features. This residual resist layer must be removed to obtain usable resist masks for pattern transfer. As this resist layer is removed using oxygen-based plasma processes, the residual thickness nonuniformity translates into feature width dispersion. Thus, the uniformity of this residual thickness after imprint remains an important issue for nanoimprint lithography and a reliable metrology procedure is required for. At present, the standard measurement method is based on scanning electron microscopy (SEM) cross section, which is destructive, time consuming, and may sometimes provide only moderate accuracy. The work presented here will assess and show the interest of scatterometry, which is a nondestructive optical method of metrology that can be easily applied to NIL. This measurement procedure exhibits very good accuracy on the two-dimensional-feature geometry determination, especially for residual thickness. Scatterometry also eases time-consuming studies like residual thickness measurement at the local scale or at the wafer scale. Moreover, this article shows that the imprint uniformity studies provide very interesting information on the mold deformation

Abstract. This paper introduces a new Light Aspiration device for in vivo Soft TIssue Characterization (LASTIC). This device is designed to be used during surgery, and can undergo sterilization. It provides interactive-time estimation of the elastic parameters. LASTIC is a 3cm x 3cm metallic cylinder divided in two compartments. The lower compartment is a cylindrical chamber made airtight by a glass window in which a negative pressure can be applied. Put in contact with soft tissues, it can aspirate the tissues into the chamber through a circular aperture in its bottom side. The upper compartment is clinched onto the lower part. A miniature digital camera is fixed inside the upper chamber, focusing on the aspirated soft tissue. LASTIC is operated by applying a range of negative pressures in the lower compartment while measuring the resulting aspirated tissue deformations with the digital camera. These measurements are used to estimate the tissue elasticity parameters by inverting a Finite Element model of the suction experiment. In order to use LAS-TIC during surgical interventions, a library-based optimization process is used to provide an interactive time inversion.