We report the voltage-dependence of voltage acceleration for ultra-thin oxides from 2.2V to 5V over a range of Tox values from 1.7nm to 5.0 nm. This unique behavior manifest itself as a power-law voltage-dependence for time-to-breakdown (TBD) over a variety of experimental observations. Using the concept of energy-to-breakdown, we explore the possible scenarios such as fractional energy or defect generation probability as a function of voltage to account for the increase in voltage acceleration with decreasing voltages.

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