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Series of poly (vinyl alcohol)/chitosan (PVA/CS) electrospun nanofibers with different weight ratio of PVA and CS were fabricated by electrospinning method. The surface morphology, diameter, and structure of electrospun nanofibers were investigated by scanning electron microscopy (SEM). As a result of PVA and CS composition measurements, the electrospun nanofibers morphologies were mainly affected by weight ratio of the polymer solution. When increasing the chitosan content in the blend solution, the electrospun nanofibers could hardly form. This result indicates that the electrospun nanofiber formation is enhanced by chitosan content.

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Room-temperature atomic layer deposition (ALD) of HfO2 was examined using tetrakis (ethylmethylamino)hafnium (TEMAH) and remote plasma-excited water and oxygen. A growth rate of 0.26 nm/cycle at room temperature was achieved, and the TEMAH adsorption and its oxidization on HfO2 were investigated by multiple internal reflection infrared absorption spectroscopy. It was observed that saturated adsorption of TEMAH occurs at exposures of ∼1 × 105 L (1 L = 1 × 10−6 Torr s) at room temperature, and the use of remote plasma-excited water and oxygen vapor is effective in oxidizing the TEMAH molecules on the HfO2 surface, to produce OH sites. The infrared study suggested that Hf–OH plays a role as an adsorption site for TEMAH. The reaction mechanism of room temperature HfO2 ALD is discussed in this paper.

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