P. Gerard scite author profile

Summary:This work describes an experimental study of the backscattering of electron beams with an energy range between 20 and 100 keV. The energy distribution of electrons backscattered by bulk gold and silicon samples at different take-off angles was determined with an original device. The different major sources of noise were studied and then the spectra obtained were processed. Theoretical interpretation of this phenomenon using Monte Carlo simulations will be presented in a future paper.

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Système de mesure de l'énergie d'électrons rétrodiffusés en fonction de l'angle d'émission

Gerard

Balladore

Pinna

et al. 1992

J. Phys. III France

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Proximity effects in electron beam lithography in SAL 601 resists on a Si-SiO2-Si substrate

Ouabbou

Martinez

Lalanne

et al. 1993

Microelectronic Engineering

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P. Gerard

Improvement of the detection efficiency of channel plate electron multiplier for atom probe application

Experimental determination of angular‐energy distributions of electrons backscattered by bulk gold and silicon samples

Système de mesure de l'énergie d'électrons rétrodiffusés en fonction de l'angle d'émission

Proximity effects in electron beam lithography in SAL 601 resists on a Si-SiO2-Si substrate

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