Système de mesure de l'énergie d'électrons rétrodiffusés en fonction de l'angle d'émission

Experimental determination of angular‐energy distributions of electrons backscattered by bulk gold and silicon samples

“…We attribute this deterioration to the constitution of our detector. When crossing the gold layer, used as a means of contact, and the dead silicon layer, the proportion of electrons, losing energy before being detected in the intrinsic region of the diode, grows (Gérard et al 1992). Supposing that the incident beam is perfectly monokinetic, we have made a Monte Carlo simulation of the energy distribution…”

“…In this article, we develop an experimental research showing the energy and angular distributions of the electrons backscattered by bulk gold and silicon samples. As the experimental device used here has been described previously (Gérard et al 1992, we briefly mention its characteristics and the measures of the energy resolution for different configurations. First, the evaluation of the importance of the different contributions, bringing about a loss of resolution, matters to us; then we set out the deconvolution method of our spectra recorded during the detection of backscattered electrons.…”