Herein we show the effect of heat treatment of two dimensional layered titanium carbide structure (Ti 3 C 2 T x ), so called MXene. As prepared MXene has functional groups -OH, -F, -Cl. In order to remove the functional groups we heat treated the MXene in Ar (with 0.01% O 2 ) and H 2 (with 0.01% H 2 O) atmospheres. We discovered the significant decrease in the amount of functional groups (-F and -Cl) and increase in the -O content, which refers to the oxidation of the material. Also we determined the optimal regime for Raman spectroscopy in order to avoid any changes in the structure of the material. We revealed that titanium carbide changes its structure at 700 °C and 900 °C into two different titanium dioxide modifications like rutile and anatase in Ar (with 0.01% O 2 ) atmosphere. Also there are small changes occurred in Ti 3 C 2 Tx structure and formation of amorphous carbon after 700 °C treatment in H 2 (with 0.01% H 2 O) atmosphere and formation of TiO 2 (rutile) at 900 °C. Energydispersive X-ray spectroscopy (EDX) revealed the reduction of functional groups at 700 °C in both atmospheres and total disappearance of -F and -Cl and increasing the oxygen at 900 °C. The huge increase of oxygen by atomic percent, can be explained by the initial oxygen content in argon and hydrogen gases.
Titanium carbide was synthetized by sputtering graphite target on heated titanium substrate by magnetron sputtering process. The obtained samples were characterized by X-ray diffraction (XRD) analysis and Raman spectroscopy, the elemental analysis was made by Energy-dispersive X-ray spectroscopy (EDX). Titanium carbide (TiC) structure was obtained by deposition of sputtered carbon atoms and clusters to the resistively heated titanium substrate surface with temperatures 700 °C, 800 °C, 900 °C and 1000 °C. The XRD analysis showed that the formation of TiC structure is take place when the substrate is heated to 1000 °C. The Raman spectroscopy showed that when the incident power of laser is 100 % (35 mW) the structure is unstable in samples with the substrate temperatures 700 °C, 800 °C and 900 °C and the most stable titanium carbide structure is created when the substrate temperature is 1000 °C.
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