Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate

Abstract

Titanium carbide was synthetized by sputtering graphite target on heated titanium substrate by magnetron sputtering process. The obtained samples were characterized by X-ray diffraction (XRD) analysis and Raman spectroscopy, the elemental analysis was made by Energy-dispersive X-ray spectroscopy (EDX). Titanium carbide (TiC) structure was obtained by deposition of sputtered carbon atoms and clusters to the resistively heated titanium substrate surface with temperatures 700 °C, 800 °C, 900 °C and 1000 °C. The XRD analysis showed that the formation of TiC structure is take place when the substrate is heated to 1000 °C. The Raman spectroscopy showed that when the incident power of laser is 100 % (35 mW) the structure is unstable in samples with the substrate temperatures 700 °C, 800 °C and 900 °C and the most stable titanium carbide structure is created when the substrate temperature is 1000 °C.

Site-Selective Synthesis of Bilayer Graphene on Cu Substrates Using Titanium as a Carbon Diffusion Barrier

“…The spectrum before growth primarily shows Ti–O peaks, while after growth, in addition to Ti–O, C–Ti–O peaks appear, indicating that Ti initially exists mainly in the form of TiO x , and part of it reacts with carbon to form TiC x O y during growth. − These analyses suggest that Ti first consumes the oxygen at the back of the Cu foil and then the carbon source during graphene growth, effectively preventing the bulk diffusion of carbon atoms through the Cu foil to form BLG. This is further confirmed by Raman spectroscopy, which shows characteristic peaks of TiO 2 before growth and TiC x O y after growth, along with the emergence of graphene characteristic peaks. − X-ray diffraction (XRD) characterization of the samples (Figure S5) was also performed. Although it is difficult to discern the peaks of Ti oxides and compounds due to the strong diffraction peaks of the Cu substrate and the possibly poor crystallinity of the Ti compounds, a weakening of the Ti oxide peaks is observed when comparing samples before and after growth, further indicating a reaction with carbon. − Exploiting the mechanism of Ti, the application of a Ti layer can be extended to significantly improve the uniformity of monolayer graphene.…”