Thermal oxidation behavior of aluminum-ion-implanted titanium nitride films has been studied in dry oxygen atmospheres. TiN films about 2ƒÊm thick were prepared on austenitic stainless steel AISI304 substrates using hollow cathode discharge ion plating. Al ions were implanted at 50keV and doses of 1 •~ 1017 and 3 •~ 1017
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.