Single-layered TiN and functionally graded Ti(C,N) coatings were magnetron sputtered to a thickness of about 1 μm, and their oxidation behavior was studied. The Ti(C,N) coating oxidized as fast as the TiN coating, forming TiO 2 as an oxide layer. The nitrogen in the TiN and Ti(C,N) coatings tended to escape from the coating via the TiO 2 layer into the air. The carbon in the Ti(C,N) coating also had strong tendency to escape. Even before the complete oxidation of the coatings, the retained coating layer and the Ti-substrate were strongly enriched with oxygen.