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Micro-resonators (MR) have become a key element for integrated optical sensors due to their integration capability and their easy fabrication with low cost polymer materials.Nowadays, there is a growing need on MRs as highly sensitive and selective functions especially in the areas of food and health. The context of this work is to implement and study integrated micro-ring resonators devoted to sensing applications. They are fabricated by processing SU8 polymer as core layer and PMATRIFE polymer as lower cladding layer. The refractive index of the polymers and of the waveguide structure as a function of the wavelength are presented. Using these results, a theoretical study of the coupling between ring and straight waveguides has been undertaken in order to define the MR design. Sub-micronic gaps of 0.5 µm to 1 µm between the ring and the straight waveguides have been successfully achieved with UV (i-lines) photolithography. Different superstrates such as air, water and aqueous solutions with glucose at different concentrations have been studied. First results show a good normalized transmission contrast of 0.98, a resonator quality factor around 1.5x10 4 corresponding to a coupling ratio of 14.7 % and ring propagation losses around 5 dB/cm.Preliminary sensing experiments have been performed for different concentrations of glucose; a sensitivity of 115 ± 8 nm/RIU at 1550 nm has been obtained with this couple of polymers.

International audienceThe fabrication of micro-resonators, made from porous silica ridge waveguides by using an electrochemical etching method of silicon substrate followed by thermal oxidation and then by a standard photolithography process, is reported. The design and fabrication process are described including a study of waveguide dimensions that provide single mode propagation and calculation of the coupling ratio between a straight access waveguide and the racetrack resonator. Scanning electronic microscopy observations and optical characterizations clearly show that the micro-resonator based on porous silica ridge waveguides has been well implemented. This porous micro-resonator is destined to be used as an optical sensor. The porous nature of the ridge waveguide constitutes the detection medium which will enhance the sensor sensitivity compared to usual micro-resonators based on the evanescent wave detection. A theoretical sensitivity of 1170 nm per refractive index unit has been calculated, taking into consideration experimental data obtained from the optical characterizations

International audienceA micro-resonator based on porous silicon ridge waveguides is implemented by a large scale standard photolithography process to obtain a low cost and sensitive sensor based on volume detection principle instead of the evanescent one usually used. The porous nature of the ridge waveguides allows the target molecules to be infiltrated in the core and to be detected by direct interaction with the propagated light. Racetrack resonator with radius of 100 µm and a coupling length of 70 µm is optically characterized for the volume detection of different concentrations of glucose. A high sensitivity of 560 nm/RIU is reached with only one micro-resonator and a limit of detection of 8.10-5 RIU, equivalent to a glucose concentration of 0.7 g/L, is obtained

International audienceModeling and experimental reflectance spectra of porous silicon single layers at different steps of functionalization and protein grafting process are adjusted in order to determine the volume fraction of the biomolecules attached to the internal pore surface. This method is applied in order to control the efficiency of the chemical functionalization process of porous silicon single layers. Using results from single porous silicon layer study, theoretical microcavity is simulated at each step of the functionalization process. The calculated reflectance spectrum is in good agreement to the experimental one. Therefore the single layers study can be applied to multilayer structures and can be adapted for other optical structures such as waveguides, interferometers for biosensing applications

International audienceResearch on sensors has experienced a noticeable development over the last decades especially in label free optical biosensors. However, compact sensors without markers for rapid, reliable and inexpensive detection of various substances induces a significant research of new technological solutions. The context of this work is the development of a sensor based on easily integrated and inexpensive micro-resonator (MR) component in integrated optics, highly sensitive and selective mainly in the areas of health and food. In this work, we take advantage of our previous studies on filters based on micro-resonators (MR) to experiment a new couple of polymers in the objective to use MR as a sensing function. MRs have been fabricated by processing SU8 polymer as core and PMATRIFE polymer as cladding layer of the waveguide. The refractive index contrast reaches 0.16 @ 1550 nm. Sub-micronic ring waveguides gaps from 0.5 to 1 µm have been successfully achieved with UV (i-line) photolithography. This work confirms our forecasts, published earlier, about the resolution that can be achieved. First results show a good extinction coefficient of ~17 dB, a quality factor around 104 and a finesse of 12. These results are in concordance with the theoretical study and they allow us to validate our technology with this couple of polymers. Work is going on with others lower cladding materials that will be used to further increase refractive index contrast for sensing applications

Owing to its high sensitivity, surface-enhanced Raman spectroscopy (SERS) is largely used in biosensing as an efficient optical technique. In this work, we report the elaboration of a novel SERS substrate based aptasensor for ultra-sensitive and selective detection of prostate specific antigen (PSA). The SERS substrate is based on silicon nanowires (SiNWs) as transducer surface coated by silver nanoparticules (AgNPs). The silver nanoparticles have two purposes : a) aptamer immobilization via thiol chemistry and b) Raman signal enhancement. The presence of PSA induces the appearance of amide vibration modes only if the aptamer is present on the surface of SiNWs. The platform is highly sensitive, selective and specific to PSA in a wide range of concentrations from 0.1 to 20 µg.L -1 with a detection limit of 0.1 µg.L -1 , which encompasses the blood serum range of healthy subjects and ill patients. This optical biosensor shows a great stability and it is successfully validated in human blood serum samples showing very good results.

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