Racetrack micro-resonators based on ridge waveguides made of porous silica

Abstract

International audienceThe fabrication of micro-resonators, made from porous silica ridge waveguides by using an electrochemical etching method of silicon substrate followed by thermal oxidation and then by a standard photolithography process, is reported. The design and fabrication process are described including a study of waveguide dimensions that provide single mode propagation and calculation of the coupling ratio between a straight access waveguide and the racetrack resonator. Scanning electronic microscopy observations and optical characterizations clearly show that the micro-resonator based on porous silica ridge waveguides has been well implemented. This porous micro-resonator is destined to be used as an optical sensor. The porous nature of the ridge waveguide constitutes the detection medium which will enhance the sensor sensitivity compared to usual micro-resonators based on the evanescent wave detection. A theoretical sensitivity of 1170 nm per refractive index unit has been calculated, taking into consideration experimental data obtained from the optical characterizations

Submicron gap reduction of micro-resonator based on porous silica ridge waveguides manufactured by standard photolithographic process

“…An extinction ratio of 25 dB has been obtained and corresponds to the contrast between the maximum of transmitted light and the minimal one at resonant wavelengths. Using the equations defined in a previous study on polymers MR [36], the theoretical transmission has been calculated and then adjusted to match the experimental one (Figure 8.a).…”

Study of Optimized Coupling Based on Micro-lensed Fibers for Fibers and Photonic Integrated Circuits in the Framework of Telecommunications and Sensing Applications

“…The microlensed fibers were also used for the optical characterizations of a racetrack integrated micro-resonator (MR), made of porous silica (PS) ridge waveguides [21], and destined to sensing applications. In this context, the aim of this work is to improve sensitivities of sensors based on easily integrated MR components by the use of a porous material.…”

Design of praseodymium-doped chalcogenide micro-disk emitting at 47 µm

“…A drawback is the lower quality factor in comparison with microspheres. This is due to the higher optical losses caused by the technological fabrication process [3]. A common technique for fabricating micro-disks is the conventional photolithography and reactive ion etching process [3].…”

“…This is due to the higher optical losses caused by the technological fabrication process [3]. A common technique for fabricating micro-disks is the conventional photolithography and reactive ion etching process [3]. An alternative technique is based on optical fiber tapering, cleaving and splicing [4].…”