Development and operation characteristics of a repetitively pulsed UV spark pre-ionized XeCl (Xenon Chloride) excimer laser is described. The laser uses discharge pumped CC charge transfer excitation. A compact gas circulation loop was adopted to achieve high repetition rate operation. The laser generates optical pulses of energy 150 mJ at 150 Hz reliably. The electrical to optical conversion efficiency obtained is 1%. The laser pulse duration is ∼8 nS (FWHM). The single fill gas lifetime have been found to be 2 × 10 6 shots for 20% reduction of energy without any halogen injection. The system is compact and reliable.
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