This paper describes a concurrent measurement of spindle radial, axial and angular motions using concentric circle grating and phase modulation interferometers. In the measurement, the concentric circle grating with fine pitch is installed on top of the spindle of interest. The grating is a reference artifact in the method. Three optical sensors are fixed over the concentric circle grating, and observe the proper positions of the grating. The optical sensor consists of a frequency modulated laser diode as a light source, and two interferometers. One interferometer in the sensor observes an interference fringe between reflected light form a fixed mirror and 0-th order diffraction light from the grating to measure the axial motion. Another interferometer in the sensor observes an interference fringe between ±2nd order diffraction lights from the grating to measure the radial motion. Using three optical sensors, three axial displacements and three radial displacements of the proper observed position of the grating can be measured. From these six measured displacements, radial, axial and angular motions of the spindle can be determined concurrently. In the paper, a measurement instrument, a fringe interpolation technique by sinusoidal phase modulation and experimental results are discussed.

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In the conventional methods of measuring radial, axial, and angular motions of a spindle concurrently, complicated reference artifacts with relative large volume, e.g., two balls linked to a cylinder, are required. A simple and small artifact is favorable from the viewpoint of accurate measurement. This paper describes a concurrent measurement of radial, axial, and angular spindle motions using concentric circle grating and phase modulation interferometers. In the measurement, concentric circle grating with fine pitch is installed on top of the spindle of interest. The grating is a reference artifact in the method. Three optical sensors are fixed over the concentric circle grating, to observe its proper positions. The optical sensor consists of a frequency modulated laser diode as a light source as well as two interferometers. One interferometer observes an interference fringe between reflected light from a fixedmirror and 0-th order diffraction light from the grating to measure the axial motion. Another interferometer observes an interference fringe between ± 2nd order diffraction lights from the grating tomeasure the radialmotion. Using three optical sensors, three axial displacements, and three radial displacements of the proper observed position of the grating can be measured. From these measured displacements, radial, axial, and angular motions of the spindle can be calculated concurrently. In this paper, a measurement instrument, a novel fringe interpolation technique using sinusoidal phase modulation, and experimental results are discussed.

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Using an SEM for quantitative analysis often requires intensity profiles along a single scan line. These profiles are usually obtained by either: 1) selecting a scan line from the CRT display, switching to Y-modulation and photographing the displayed intensity profile, or 2) scanning the negative of a photograph of the entire CRT display along a line using a microdensitometer. The first method requires additional measurements of the CRT beam deflection to get quantitative information, and thus has limited accuracy. The second method places another interface between the measurement and the detector signal.For SEMs or STEMs equipped for energy dispersive x-ray analysis with a multichannel analyzer (MCA) and minicomputer, modifications can be made to the circuitry to allow digital recording of line scan intensity data directly with the MCA.