Generation and Storage of SEM or STEM Intensity Profiles on a Multi-Channel Analyzer

Abstract

Using an SEM for quantitative analysis often requires intensity profiles along a single scan line. These profiles are usually obtained by either: 1) selecting a scan line from the CRT display, switching to Y-modulation and photographing the displayed intensity profile, or 2) scanning the negative of a photograph of the entire CRT display along a line using a microdensitometer. The first method requires additional measurements of the CRT beam deflection to get quantitative information, and thus has limited accuracy. The second method places another interface between the measurement and the detector signal.For SEMs or STEMs equipped for energy dispersive x-ray analysis with a multichannel analyzer (MCA) and minicomputer, modifications can be made to the circuitry to allow digital recording of line scan intensity data directly with the MCA.