Proposal of concurrent measurement method for spindle radial, axial and angular motions using concentric grating interferometers

Madden, Muhummad; Aketagawa, Masato; Ohkubo, Yuria; Kimura, Shohei; Maruyama, Hideki; Higuchi, Satoru; Okuyama, Eiki

doi:10.1504/ijsurfse.2009.026612

Cited by 5 publications

(6 citation statements)

References 9 publications

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“…Many grating grooves were formed on the nickel phosphide plate. In the grating, 1000 pitches were formed with a concentric circle structure [13]. We measured spindle radial, axial and angular motions using the system shown in figure 3.…”

Section: Experiments and Discussionmentioning

confidence: 99%

“…In order to reduce the centering error, the spindle rotation center must be nearly aligned to the center of the concentric circle grating. The grating plane must be aligned to be nearly parallel with the XY plane -within 10 arcseconds to reduce the crosstalk error [13]. In figure 1, the spindle rotation center is selected as the origin point of the XYZ coordinate system.…”

Section: Spindle Error Motion Measurementmentioning

confidence: 99%

“…Using the Lissajous diagram, the axial (z-axis) and radial (x-axis) displacements of the grating can be calculated concurrently. In the optical sensor, to reduce crosstalk error between the Z and X axes interferometers down to 10 −4 order, the grating plane must be aligned to be nearly parallel with the XY plane within 10 arcseconds [13]. Even though the electronics circuit in the interferometer is complicated, we can reduce the number of optical elements for the interpolation.…”

Section: Optical Sensormentioning

confidence: 99%

“…The optical sensor A is located along the Y-axis with the distance R A from the center and measures the Y-axis and Z-axis displacements y A and z A , whereas the optical sensor B and C are located along the Xaxis with the distances R B and R C from the center, and measure the X-axis and Z-axis displacements x B , z B , x C and z C . From the measured displacements by the three optical sensors, the radial R x, R y , axial R z and angular x , y motions can be derived as [13]…”

Section: Introductionmentioning

confidence: 99%

“…We add the sinusoidal modulation to (- where k m0 is the modulation index. By combining of the equations (11) and (13) and using the Bessel function (J m (k), k: modulation index, m=1, 2, 3, …), we can obtain,…”

Section: Introductionmentioning

confidence: 99%

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Concurrent measurement method of spindle radial, axial and angular motions using concentric circle grating and phase modulation interferometers

Madden¹,

Aketagawa²,

Kumagai³

et al. 2014

Meas. Sci. Technol.

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This paper describes a concurrent measurement of spindle radial, axial and angular motions using concentric circle grating and phase modulation interferometers. In the measurement, the concentric circle grating with fine pitch is installed on top of the spindle of interest. The grating is a reference artifact in the method. Three optical sensors are fixed over the concentric circle grating, and observe the proper positions of the grating. The optical sensor consists of a frequency modulated laser diode as a light source, and two interferometers. One interferometer in the sensor observes an interference fringe between reflected light form a fixed mirror and 0-th order diffraction light from the grating to measure the axial motion. Another interferometer in the sensor observes an interference fringe between ±2nd order diffraction lights from the grating to measure the radial motion. Using three optical sensors, three axial displacements and three radial displacements of the proper observed position of the grating can be measured. From these six measured displacements, radial, axial and angular motions of the spindle can be determined concurrently. In the paper, a measurement instrument, a fringe interpolation technique by sinusoidal phase modulation and experimental results are discussed.

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Section: Experiments and Discussionmentioning

confidence: 99%

Section: Spindle Error Motion Measurementmentioning

confidence: 99%

Section: Optical Sensormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Concurrent measurement method of spindle radial, axial and angular motions using concentric circle grating and phase modulation interferometers

Madden¹,

Aketagawa²,

Kumagai³

et al. 2014

Meas. Sci. Technol.

Self Cite

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show abstract

Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder — Review

Lee

2013

J Mech Sci Technol

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Simultaneous measurement of 5DOF spindle error motions in CNC machine tools

et al. 2022

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We present a method for the simultaneous measurement of 5 degree-of-freedom (DOF) spindle error motions in computer numerical control (CNC) machine tools and develop a measurement system. The measurement system uses polarization-maintaining fiber coupled with a dual-frequency laser as the light source. The axial error motion of the spindle is measured by heterodyne interferometry, and other 4DOF error motions are obtained by collimation measurement. Based on the measurement system, a comprehensive measurement model of spindle error motion was established. The influence of system error on the measurement accuracy of the spindle tilt error motion and radial error motion was analyzed. According to the measurement model, a corresponding data-processing method is proposed, which removes some systematic errors. A series of experiments was conducted to verify the feasibility and effectiveness of the proposed measurement system and the corresponding measurement model.

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Proposal of concurrent measurement method for spindle radial, axial and angular motions using concentric grating interferometers

Cited by 5 publications

References 9 publications

Concurrent measurement method of spindle radial, axial and angular motions using concentric circle grating and phase modulation interferometers

Concurrent measurement method of spindle radial, axial and angular motions using concentric circle grating and phase modulation interferometers

Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder — Review

Simultaneous measurement of 5DOF spindle error motions in CNC machine tools

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