Using a silicon fabricated slider, the output force and the maximum traverse velocity of a surface acoustic wave motor has been improved up to 12 times larger force and twice faster speed than the previous motor which used a multi contact points slider. To obtain the high output force, large contact area between the slider and the stator transducer is required. Therefore a silicon slider was developed and tested. As a result, the maximum output force of 3.5 N and the maximum traverse velocity of 0.65 m/s were obtained. The maximum output force of 3.5 N was 90 times of the transducer weight. Such a high output force performance is produced by high power density of surface acoustic wave devices and friction drive.
-The effects of ceramic thin film coating on friction surfaces for surface acoustic wave (SAW) linear motor were estimated. By using a slider coated with SiC, the maximum no-load speed of the slider was approximately 1.1 m/s, which was equivalent to the horizontal vibration velocity of the Rayleigh wave at the driving voltage of 125 V 0-p . The transient responses about four kinds of driving voltage by using the slider coated with SiC was examined, then the no-load speed of the slider was 1.5 m/s at 170 V 0-p . Furthermore, by using a slider coated with HA-DLC and a stator coated with Al 2 O 3 , the no-load speed and the output force of the slider were approximately 1.5 m/s and 3 N at 190 V 0-p . It was shown that the driving characteristics were improved by ceramic thin film coating with the proper materials such as SiC, HA-DLC and Al 2 O 3 on friction surfaces.
Hybrid transducer type ultrasonic motors have the advantage of freedom of design. A linear motor of this type consists of a longitudinal vibrator and multilayered piezoelectric actuators. The transducer is operated at the resonance frequency of the vibrator. In this paper, the characteristics are measured in a study of the basic operating conditions, and a maximum speed of 50 cm/s, maximum force of 500 gf and maximum efficiency of 36% are recorded. It is believed that performance can be improved by theoretical studies.
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