Effects of ceramic thin film coating on friction surfaces for surface acoustic wave linear motor

Abstract

-The effects of ceramic thin film coating on friction surfaces for surface acoustic wave (SAW) linear motor were estimated. By using a slider coated with SiC, the maximum no-load speed of the slider was approximately 1.1 m/s, which was equivalent to the horizontal vibration velocity of the Rayleigh wave at the driving voltage of 125 V 0-p . The transient responses about four kinds of driving voltage by using the slider coated with SiC was examined, then the no-load speed of the slider was 1.5 m/s at 170 V 0-p . Furthermore, by using a slider coated with HA-DLC and a stator coated with Al 2 O 3 , the no-load speed and the output force of the slider were approximately 1.5 m/s and 3 N at 190 V 0-p . It was shown that the driving characteristics were improved by ceramic thin film coating with the proper materials such as SiC, HA-DLC and Al 2 O 3 on friction surfaces.

Miniaturized SAW Motor with 100 MHz Drive Frequency

“…A maximum output force of 13 mN was obtained on the 40 V peak driving voltage condition. The experimental result showed diffuse output force values, which contrasts with the performance under larger preload conditions (4) . Utilization of a larger preload structure such as several Newtons would thus stabilize the performance of the miniaturized SAW motor, which in turn would enlarge the output force.…”

Segment-structured diamond-like carbon films for friction surface of surface acoustic wave linear motor

“…A surface acoustic wave (SAW) linear motor [1][2] is a kind of ultrasonic motor, which has additional merits such as thin structure, easy installation and so on. The motor has employed a silicon slider [3] and performed large output force of 10 N [4] and fast traverse speed more than 1 m/s [5]. On the silicon slider surface, a distribution of projections was formed by etching.…”

“…diamond-like carbon (DLC) film on the stator transducer surface has been already indicated [5]. DLC is highly functional material.…”

Ultra Low-Velocity Control of a Surface Acoustic Wave Linear Motor

“…Because a silicon slider (3) was employed in the motor, the motor can perform with a much larger output force of 10 N (4) and a fast no-load speed of more than 1.5 m/s (5) . The motor has the possibility of a precise positioning resolution of several ten nm (6) .…”