Miniaturized SAW Motor with 100 MHz Drive Frequency

Sügimura, Takashi; Kurosawa, Minoru Kuribayashi

doi:10.1541/ieejsmas.126.166

Cited by 25 publications

(12 citation statements)

References 6 publications

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“…Surface acoustic waves (SAWs) propagating in piezoelectric materials have numerous applications, such as in sensors [ 1 , 2 , 3 ], actuators [ 4 , 5 ], filters [ 6 , 7 , 8 ], delay lines [ 9 ], and radio-frequency identification applications [ 10 , 11 ]. They are usually excited via a set of interdigitated electrodes (IDTs) that are deployed as transmitters and receivers or as non-collocated [ 12 , 13 ] or collocated [ 14 ] transceivers.…”

Section: Introductionmentioning

confidence: 99%

Characterization of Shear Horizontal Waves Using a 1D Laser Doppler Vibrometer

Elhady

Abdel‐Rahman

2021

Sensors

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We developed a new technique for the detection of shear horizontal surface acoustic waves (SH-SAW) using a one-dimensional laser-based Doppler vibrometer. It measures the out-of-plane surface deformation at the fingertip of an interdigitated transducer (the boundary of the wave aperture) and uses it to estimate the instantaneous in-plane displacement field given the substrate Poisson ratio. It can also estimate the degree of surface confinement (wave decay rate). The proposed approach was first verified using finite element analysis (FEA) and demonstrated experimentally using a Bleustein–Gulyaev resonator.

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Section: Introductionmentioning

confidence: 99%

Characterization of Shear Horizontal Waves Using a 1D Laser Doppler Vibrometer

Elhady

Abdel‐Rahman

2021

Sensors

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“…In the linear type, a standing wave is generated by a combination of eigenmodes or by setting some protuberance on the surface of the PZT material [9,10]. In addition, a traveling wave can also be obtained using an elastic guide beam or surface acoustic waves [11,12]. In recently reported linear type microactuators, the sliders are usually smaller compared to the long stators.…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, the energy conversion coefficient is low since the energy is consumed on the long vibration beam [12,13].In this work, a novel cylindrical ultrasonic linear microactuator (CULMA) with bi-directional motion is presented. The CULMA with a compact structure is composed of a stator and slider with similar geometric sizes, which is different from previous devices typically had longer guide beams or larger driving areas [11,12]. In particular, this type of microactuator does not require a guideway mechanism since the cylindrical slider is moving along the stator.…”

Section: Introductionmentioning

confidence: 99%

Cylindrical ultrasonic linear microactuator based on quasi-traveling wave propagation on a thin film metallic glass pipe supported by a piezoelectric ceramic tube

Sun

Wang

Hata

et al. 2009

Sensors and Actuators A: Physical

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“…Moreover, they have the advantage of the high-resolution direction drive in the micro optical controlling systems. Even the miniaturized SAW actuator with 100MHz drive frequency was reported [3], it also can not avoid the immanent disadvantage of bidirectional IDT, Le. the high insertion loss.…”

Section: Introductionmentioning

confidence: 99%

Research on a novel SAW actuator of Floating Electrode Unidirectional Transducer

Zhang

et al. 2009

2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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of these merits, it is necessary for us to take a research on the floating electrode unidirectional SAW actuator.II.THEORETICAL ANALYSIS The structure of FEUDT is shown in Fig 1. It makes use of floating electrodes to obtain directivity [5]. This transducer has six electrodes per period. These electrodes all have constant width and spacing. Electrodes 1 and 4 are fIXed on the bus bars and connected to the RF electrical power, electrodes 2, 3, 5 and 6 are floating, and electrodes 2 and 5 are connected to each other. The fIXed Electrodes and the connected floating electrodes play an important role in the stimulation of the SAW, this makes the center of stimulation 1J12 away from the center of reflection, and the amplitude of leftward SAW is not equal to the rightward. As is shown in Fig 2, bulk wave and SAWare created by stimulating the FEUDT on the substrate, Bulk wave scatters to the space or the deeper substrate, only the SAW propagation on the piezoelectric materials is useful to the drive. We can see the real line SAW to the right has greater amplitude than the dotted line SAW to the left. Consequently, the feature of design results in directivity.Abstract-SAW actuators are required for a micro actuator due to their high output force and direct drive. A new type IDT, Floating Electrode Unidirectional Transducer (FEUDT) is implemented by using MEMS technologies in the paper. The optimal designs were proposed and compared with others in the end. The dimensions of the FEUDT are 5mm aperture size, 80Jim pitch, 6.7Jim strip width, O.8Jim thick. In comparison with other types of SAW actuator, FEUDT SAW actuator has higher frequency vibrations and more effectively controllable drive direction.

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Miniaturized SAW Motor with 100 MHz Drive Frequency

Cited by 25 publications

References 6 publications

Characterization of Shear Horizontal Waves Using a 1D Laser Doppler Vibrometer

Characterization of Shear Horizontal Waves Using a 1D Laser Doppler Vibrometer

Cylindrical ultrasonic linear microactuator based on quasi-traveling wave propagation on a thin film metallic glass pipe supported by a piezoelectric ceramic tube

Research on a novel SAW actuator of Floating Electrode Unidirectional Transducer

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