2009
DOI: 10.1016/j.sna.2009.10.004
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Cylindrical ultrasonic linear microactuator based on quasi-traveling wave propagation on a thin film metallic glass pipe supported by a piezoelectric ceramic tube

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Cited by 7 publications
(2 citation statements)
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“…Additionally there have been rapid strides in using Pd based thin film metallic glasses (TFMGs) for piezoelectric ultrasound motors, micro actuators and sensors, [4][5][6][7] and as the basic building blocks of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) [8,9]. In particular the technological and scientific significance of the Pd-Cu-Ni-P system has resulted in systematic structural and physical elucidation by different pioneering groups with current studies as recent as 2012 [10][11][12][13][14][15][16][17][18][19][20][21][22].…”
Section: Introductionmentioning
confidence: 99%
“…Additionally there have been rapid strides in using Pd based thin film metallic glasses (TFMGs) for piezoelectric ultrasound motors, micro actuators and sensors, [4][5][6][7] and as the basic building blocks of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) [8,9]. In particular the technological and scientific significance of the Pd-Cu-Ni-P system has resulted in systematic structural and physical elucidation by different pioneering groups with current studies as recent as 2012 [10][11][12][13][14][15][16][17][18][19][20][21][22].…”
Section: Introductionmentioning
confidence: 99%
“…Bulk Metallic Glasses (BMG) have recently been incorporated in high-performance applications at the macroscale [1,2] and at the fine scale [3], as well as in two-phase (crystal/glass) microstructures [4]. BMGs have strengths approaching theoretical limits, very high hardness and elastic limits [5].…”
Section: Introductionmentioning
confidence: 99%